Surface chemistry of pentakis(dimethylamido)tantalum on Ta surfaces

Journal of Physical Chemistry C

Volumn 115, Issue 16, 2011, Pages 8240-8247

  Kim, Taeseung ^a   Zaera, Francisco ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

A-CARBON; AMIDO GROUPS; AMIDO LIGANDS; CARBON FORMING; DIMETHYLAMIDO; DIMETHYLAMINES; HYDRIDE ELIMINATION; HYDROGEN ATOMS; HYDROGEN CYANIDE; INTRAMOLECULAR HYDROGEN TRANSFER; ISOTHERMAL KINETICS; ISOTOPE LABELING; METHANE FORMATION; REACTION MIXTURE;

AMMONIA; ATOMIC LAYER DEPOSITION; CYANIDES; ETHYLENE; HYDROGEN; HYDROGENATION; ISOTOPES; METHANATION; METHANE; SURFACE CHEMISTRY; TEMPERATURE PROGRAMMED DESORPTION; TERNARY SYSTEMS;

TANTALUM;

EID: 79955417265     PISSN: 19327447     EISSN: 19327455     Source Type: Journal    
DOI: 10.1021/jp201564v     Document Type: Article

References (46)

1. Holloway, K.; Fryer, P. M.; Cabral, C.; Harper, J. M. E.; Bailey, P. J.; Kelleher, K. H. J. Appl. Phys. 1992, 71, 5433
2. Sun, X.; Kolawa, E.; Chen, J.-S.; Reid, J. S.; Nicolet, M.-A. Thin Solid Films 1993, 236, 347
3. Min, K.-H.; Chun, K.-C.; Kim, K.-B. J. Vac. Sci. Technol. B 1996, 14, 3263
4. Tsai, M. H.; Sun, S. C.; Tsai, C. E.; Chuang, S. H.; Chiu, H. T. J. Appl. Phys. 1996, 79, 6932
5. Ritala, M.; Niinistö, J. ECS Trans. 2009, 25, 641
6. Schaekers, M.; Van Ammel, A.; Travaly, Y.; Delabie, A.; Hoyas, A. M.; Zhao, C. ECS Trans. 2006, 1, 3
7. Kim, D. K.; Kim, B. H.; Woo, H. G.; Kim, D. H.; Shin, H. K. J. Nanosci. Nanotechnol. 2006, 6, 3392
8. Kim, H.; Detavernier, C.; van der Straten, O.; Rossnagel, S. M.; Kellock, A. J.; Park, D. G. J. Appl. Phys. 2005, 98
9. Maeng, W. J.; Park, S. J.; Kim, H. J. Vac. Sci. Technol. B 2006, 24, 2276
10. Kim, S. H.; Im, S. J.; Kim, K. B. Thin Solid Films 2002, 415, 177
11. Zaera, F. J. Mater. Chem. 2008, 18, 3521
12. Wu, Y. Y.; Kohn, A.; Eizenberg, M. J. Appl. Phys. 2004, 95, 6167
13. Chen, S.-J.; Zhang, X.-H.; Yu, X.; Qiu, H.; Yap, G. P. A.; Guzei, I. A.; Lin, Z.; Wu, Y.-D.; Xue, Z.-L. J. Am. Chem. Soc. 2007, 129, 14408
14. Xie, Q.; Musschoot, J.; Detavernier, C.; Deduytsche, D.; Meirhaeghe, R. L. V.; Berghe, S. V. d.; Jiang, Y. L.; Ru, G. P.; Li, B. Z.; Qu, X. P. Microelectron. Eng. 2008, 85, 2059
15. Sharma, M.; Dube, A.; Hughes, K. J.; Engstrom, J. R. Langmuir 2008, 24, 8610
16. Elam, J. W.; Schuisky, M.; Ferguson, J. D.; George, S. M. Thin Solid Films 2003, 436, 145
17. Dubois, L. H.; Zegarski, B. R.; Girolami, G. S. J. Electrochem. Soc. 1992, 139, 3603
18. Musher, J. N.; Gordon, R. G. J. Mater. Res. 1996, 11, 989
19. Yun, J. Y.; Park, M. Y.; Rhee, S. W. J. Electrochem. Soc. 1999, 146, 1804
20. Kan, B.-C.; Boo, J.-H.; Lee, I.; Zaera, F. J. Phys. Chem. A 2009, 113, 3946
21. Shin, H. K.; Shin, H. J.; Lee, J. G.; Kang, S. W.; Ahn, B. T. Chem. Mater. 1997, 9, 76
22. Bouman, M.; Zaera, F. ECS Trans. 2010, 33, 291
23. Xu, M.; Tiznado, H.; Kang, B.-C.; Bouman, M.; Lee, I.; Zaera, F. J. Korean Phys. Soc. 2007, 51, 1063
24. Pinchart, A.; Blasco, N.; Lachaud, C.; Schleisman, A.; Dussarrat, C.; Suzuki, I.; Yanagita, K. Novel thermally-stable hafnium and zirconium ALD precursors. ASMC (Advanced Semiconductor Manufacturing Conference) Proceedings, 2007.
25. Tiznado, H.; Bouman, M.; Kang, B.-C.; Lee, I.; Zaera, F. J. Mol. Catal. A 2008, 281, 35
26. Kelly, M. J.; Han, J. H.; Musgrave, C. B.; Parsons, G. N. Chem. Mater. 2005, 17, 5305
27. Wang, Y.; Dai, M.; Ho, M. T.; Wielunski, L. S.; Chabal, Y. J. Appl. Phys. Lett. 2007, 90, 022906/1
28. Sperling, B. A.; Kimes, W. A.; Maslar, J. E.; Chu, P. M. J. Vac. Sci. Technol. A 2010, 28, 613
29. Truong, C. M.; Chen, P. J.; Corneille, J. S.; Oh, W. S.; Goodman, D. W. J. Phys. Chem. 1995, 99, 8831
30. Tiznado, H.; Zaera, F. J. Phys. Chem. B 2006, 110, 13491
31. Zaera, F. Int. Rev. Phys. Chem. 2002, 21, 433
32. Wilson, J.; Guo, H.; Morales, R.; Podgornov, E.; Lee, I.; Zaera, F. Phys. Chem. Chem. Phys. 2007, 9, 3830
33. Liu, J.; Xu, M.; Nordmeyer, T.; Zaera, F. J. Phys. Chem. 1995, 99, 6167
34. Wilson, J. N.; Zaera, F. J. Phys. Chem. C 2010, 114, 16946
35. TRC Spectral Data-Mass (formerly Selected Mass Spectral Data), Thermodynamics Research Center Hydrocarbon Project, Texas Engineering Experimental Station, The Texas A&M University System, College Station, 1984, Report.
36. Sloan, D. W.; Blass, P. M.; White, J. M. Appl. Surf. Sci. 1999, 143, 142
37. Wilson, J. N.; Pedigo, R. A.; Zaera, F. J. Am. Chem. Soc. 2008, 130, 15796
38. Cundari, T. R.; Morse, J. M. Chem. Mater. 1996, 8, 189
39. Rodriguez-Reyes, J. C. F.; Teplyakov, A. V. J. Appl. Phys. 2008, 104
40. Driessen, J. P. A. M.; Kuypers, A. D.; Schoonman, J. Surf. Coat. Technol. 1998, 110, 173
41. Rodriguez-Reyes, J. C. F.; Teplyakov, A. V. J. Phys. Chem. C 2007, 111, 16498
42. Won, Y. S.; Park, S. S.; Kim, Y. S.; Anderson, T. J.; McElwee-White, L. J. Cryst. Growth 2009, 311, 3587
43. Shen, M.; Zaera, F. J. Am. Chem. Soc. 2009, 131, 8708
44. Shen, M.; Guo, H.; Zaera, F. Top. Catal. 2011, 10.1007/s11244-011-9611-3
45. Shen, M.; Zaera, F. Angew. Chem., Int. Ed. 2008, 47, 6583
46. Shen, M.; Zaera, F. J. Phys. Chem. C 2008, 112, 1636