Structure, mechanical property, and tribological behavior of c-NbN/CN x multilayers grown by magnetron sputtering

Surface and Coatings Technology

Volumn 206, Issue 19-20, 2012, Pages 4040-4045

  Zhang, Kan ^a   Wen, M ^a   Meng, Q N ^a   Zeng, Y ^a   Hu, C Q ^a   Liu, C ^a   Zheng, W T ^a  

^a JILIN UNIVERSITY   (China)

Author keywords

Friction and wear; Hardness; Magnetron sputtering; Multilayer; NbN CN x

Indexed keywords

FRICTION AND WEAR; FRICTION COEFFICIENTS; H/E RATIO; HIGH STRESS; MAXIMUM VALUES; NBN/CN X; REACTIVE MAGNETRON SPUTTERING; ROUGH INTERFACES; RULE OF MIXTURE; SI (100) SUBSTRATE; SINGLE LAYER; TRIBOLOGICAL BEHAVIORS; YOUNG'S MODULUS;

ELASTIC MODULI; FRICTION; HARDNESS; MAGNETRON SPUTTERING; MIXTURES; TEXTURES; TRIBOLOGY;

MULTILAYERS;

EID: 84861460116     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2012.03.085     Document Type: Article

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