Characterizations of CrN/a-CNx nanolayered coatings deposited by DC reactive magnetron sputtering of Cr and graphite targets

Vacuum

Volumn 86, Issue 2, 2011, Pages 206-209

  Briois, P ^a   Mercs, D ^a   Demange, V ^b   Banakh, O ^c   Sanchette, F ^a   Billard, A ^a  

^a UNIVERSITÉ DE TECHNOLOGIE DE BELFORT MONTBÉLIARD   (France)

^b UNIVERSITÉ DE RENNES 1   (France)

^c Haute Ecole Arc Engineering   (Switzerland)

Author keywords

Magnetron sputtering; Mechanical behaviours; Nanolayer

Indexed keywords

BILAYER THICKNESS; DC REACTIVE MAGNETRON SPUTTERING; GRAPHITE TARGET; LAW OF MIXTURE; MECHANICAL BEHAVIOURS; NANO LAYERS; NANOLAYERED COATINGS; PREFERRED ORIENTATIONS; TRIBOLOGICAL BEHAVIOUR;

GRAPHITE; MAGNETRON SPUTTERING;

CHROMATE COATINGS;

EID: 80051792668     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2011.06.008     Document Type: Article

References (23)

1. R. Rebolé, A. Martínez, R. Rodriguez, G.G. Fuentes, E. Spain, and N. Watson Thin Solid Films 469-470 2004 466
2. J. Creus, H. Idrissi, H. Mazille, F. Sanchette, and P. Jacquot Surf Coat Technol 107 2-3 1998 183
3. L. Cunha, and M. Andritschky Surf Coat Technol 111 2-3 1999 158
4. Hae-Suk Jung, and Hyung-Ho Park Appl Surf Sci 216 2003 149 155
5. J.C. Sanchez-Lopez, C. Donnet, and T. Le Mogne Vacuum 64 2002 191 198
6. Q. Yang, and L.R. Zhao Surf Coat Technol 200 5-6 2005 1709
7. P.Eh. Hovsepian, D.B. Lewis, and W.-D. Münz Surf Coat Technol 133-134 2000 166
8. J. Paulitsch, P.H. Mayrhofer, W.-D. Münz, and M. Schenkel Thin Solid Films 517 3 2008 1239
9. Q. Luo, P.Eh. Hovsepian, D.B. Lewis, W.-D. Münz, Y.N. Kok, and J. Cockrem Surf Coat Technol 193 1-3 2005 39
10. C. Ducros, C. Cayron, and F. Sanchette Surf Coat Technol 201 1-2 2006 136
11. C. Ducros, and F. Sanchette Surf Coat Technol 201 3-4 2006 1045
12. W.C. Oliver, and G.M. Pharr J Mater Res 7 1992 1564
13. F. Sanchette, Tran Huu Loi, A. Billard, and C. Frantz Surf Coat Technol 74/75 1995 903
14. A. Vyas, Y.G. Shen, Z.F. Zhou, and K.Y. Li Compos Sci Technol 68 14 2008 2922
15. Youn J. Kim, Tae J. Byun, and Jeon G. Han Surf Coat Technol 203 5-7 2008 790
16. N. Schell, J.H. Petersen, J. Bøttiger, A. Mücklich, J. Chevallier, and K.P. Andreasen Thin Solid Films 426 1-2 2003 100
17. P. Yashar, and W.D. Sproul Vacuum 55 1999 179
18. Xi Chu, and Scott A. Barnett J Appl Phys 77 9 1995 4403
19. U. Helmersson, S. Todorova, S.A. Barnett, J.E. Sundgren, L.C. Markety, and J.E. Greene J Appl Phys 62 2 1987 481
20. W.D. Sproul J Vac Sci Technol A 12 4 1994 1595
21. S. Logothetidis, S. Kassavetis, C. Charitidis, Y. Panayiotatos, and A. Laskarakis Carbon 42 2004 1133
22. C. Chouquet, C. Ducros, S. Barrat, A. Billard, and F. Sanchette Surf Coat Technol 203 5-7 2008 745
23. C. Chouquet, G. Gerbaud, M. Bardet, S. Barrat, A. Billard, and F. Sanchette Surf Coat Technol 204 9-10 2010 1339