Relationship between mechanical properties and coefficient of friction of sputtered a-C/Cu composite thin films

Diamond and Related Materials

Volumn 17, Issue 11, 2008, Pages 1905-1911

  Musil, J ^a   Louda, M ^a   Soukup, Z ^a   Kubasek M ^a  

^a UNIVERSITY OF WEST BOHEMIA   (Czech Republic)

Author keywords

a C Cu film; Composite; Friction; Mechanical properties; Sputtering

Indexed keywords

ARGON; CARBON; COMPOSITE FILMS; COPPER ALLOYS; EPITAXIAL GROWTH; FRICTION; GRAPHITE; INERT GASES; MECHANICAL PROPERTIES; SCALE (DEPOSITS); SILICON; SPUTTER DEPOSITION; THICK FILMS;

A-C/CU FILM; C FILMS; CO-EFFICIENT OF FRICTION; COMPOSITE; COMPOSITE THIN FILMS; DEPOSITION CONDITIONS; GRAPHITE TARGETS; MACRO STRESS; SI SUBSTRATES; SPUTTERING; UNBALANCED MAGNETRON;

COPPER;

EID: 52049094574     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2008.04.009     Document Type: Article

References (33)

1. Grill A. Diamond Relat. Mater. 8 (1999) 428
2. Lifshitz Y. Diamond Relat. Mater. 8 (1999) 1659
3. Zhang S., Bui X.L., Zeng X.T., and Li X. Thin Solid Films 482 (2005) 138
4. Robertson J. Mater. Sci. Eng. R 37 (2002) 129
5. Zhang S., Bui X.L., and Fu Y. Thin Solid Films 467 (2004) 261
6. Zhang S., Bui X.L., Fu Y., Butler D.L., and Du H. Diamond Relat. Mater. 13 (2004) 867
7. Pauleau Y., and Thiery F. Surf. Coat. Technol. 180-181 (2004) 313
8. Dimigen H., and Klages C.-P. Surf. Coat. Technol. 49 (1991) 543
9. Damasceno J.C., Camaro Jr. S.S., Freire Jr. F.L., and Carius R. Surf. Coat. Technol. 133-134 (2000) 247
10. Tay B.K., Cheng Y.H., Ding X.Z., Lau S.P., Shi X., You G.F., and Sheeja D. Diamond Relat. Mater. 10 (2001) 1082
11. Ban M., and Hasegawa T. Surf. Coat. Technol. 162 (2002) 1
12. Nilsson D., Svahn F., Wiklundm U., and Hogmark S. Wear 254 (2003) 1084
13. Zhang S., Bui X.L., and Fu Y. Surf. Coat. Technol. 167 (2003) 137
14. Dub S., Pauleau Y., and Thiery F. Surf. Coat. Technol. 180-181 (2004) 551
15. Chang Y.Y., Wang D.Y., Chang C.H., and Wu W.T. Surf. Coat. Technol. 184 (2004) 349
16. Chen C.C., and Hong F.C.-N. Appl. Surf. Sci. 242 (2005) 261
17. Uglov V.V., and Kuleshov A.K. Comp. Sci. Techn. 65 (2005) 785
18. Onoprienko A.A., Danilenko N.I., and Kossko I.A. Thin Solid Films 515 (2007) 6672 doi:10.1016/j.tsf.2007.01.007
19. Pauleau Y., Thiery F., Uglov V.V., Anishchik V.M., Kuleshov A.K., and Samtsov M.P. Surf. Coat. Technol. 180-181 (2004) 102
20. Jacobsohn L.G., and Freire Jr. F.L. J. Vac. Sci. Technol. A 17 5 (1999) 2841
21. Musil J., and Šůna J. Materials Science Forum 502 (2005) 291
22. Musil J., Šícha J., Heřman D., and Čestvý R. J. Vac. Sci. Technol. A 25 4 (2007) 666
23. Schwan J., Ulrich S., Roth H., Ehrhardt H., Silva S.R.P., Robertson J., Samlenski R., and Brenn R. J. Appl. Phys. 79 (1996) 1416
24. Musil J., Heřman D., and Šícha J. J. Vac. Sci. Technol. A 24 3 (2006) 521
25. Erdemir A., Eryilmaz O.L., and Fenske G. J. Vac. Sci. Technol. A 18 4 (2000) 1987
26. Voevodin A.A., and Zabinski J.S. Comp. Sci. Techn. 65 (2005) 741
27. Voevodin A.A., and Zabinski J.S. In: Voevodin A.A., Shtansky D.V., Levashov E.A., and Moore J.J. (Eds). Nanostructured thin films and nanodispersion strengthened coatings (2004), Kluwer Academic Publishers, Doedrecht 1
28. Donnet C., and Erdemir A. In: Pauleau Y. (Ed). Materials Surface Processing by Directed Energy Techniques (2006), Elsevier, Oxford 573
29. Pei Y.T., Galvan D., De Hosson J.Th.M., and Cavaleiro A. Surf. Coat. Technol. 198 (2005) 44
30. Pei Y.T., Galvan D., De Hosson J.Th.M., and Strondl C. J. European Ceramic Society 26 (2006) 565
31. Pei Y.T., Huizenga P., Galvan D., and De Hosson J.Th.M. J. Appl. Phys. 100 (2006) 114309
32. Ha P.C.T., McKenzie D.R., Bilek M.M.M., Doyle E.D., McCulloch D.G., and Chu P.K. Surf. Coat. Technol. 200 (2006) 6405
33. Cutnell J., and Johnson K. Physics. 4th Edition (1998), John Wiley and Sons, New York 755