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Volumn 203, Issue 5-7, 2008, Pages 790-793
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Tribological and mechanical behaviors of CrN/a-CNx superlattice thin films
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Author keywords
Bilayer period; CrN a CNx; Superlattice
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Indexed keywords
ABS RESINS;
FRICTION;
HARDNESS;
HARDNESS TESTING;
INORGANIC COATINGS;
MAGNETRON SPUTTERING;
NITRIDES;
THICK FILMS;
THIN FILMS;
TRANSITION METALS;
BILAYER PERIOD;
BILAYER PERIODS;
CLOSED FIELD UNBALANCED MAGNETRON SPUTTERING;
CRN/A-CNX;
DEFORMATION RESISTANCES;
FRICTION COEFFICIENTS;
LUBRICATION MATERIALS;
MECHANICAL BEHAVIORS;
NANO INDENTATIONS;
PREFERRED ORIENTATIONS;
ROTATIONAL SPEEDS;
SUBSTRATE HOLDERS;
SUPERHARD COATINGS;
SUPERLATTICE THIN FILMS;
SUPERLATTICES;
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EID: 55749091954
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/j.surfcoat.2008.08.020 Document Type: Article |
Times cited : (15)
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References (14)
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