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Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 15, Issue 3, 1997, Pages 946-950

Preparation and characterization of superhard CNX/ZrN multilayers

(6) Wu, Mei Ling a Lin, Xi Wei a Dravid, Vinayak P a Chung, Yip Wah a Wong, Ming Show b Sproul, William D b

a Northwestern University (United States)

b NORTHWESTERN UNIVERSITY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000125901 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.580784 Document Type: Article

Times cited : (46)

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