Effects of substrate bias on the preferred orientation, phase transition and mechanical properties for NbN films grown by direct current reactive magnetron sputtering

Journal of Applied Physics

Volumn 104, Issue 2, 2008, Pages

  Wen, M ^a   Hu, C Q ^a   Wang, C ^a   An, T ^a   Su, Y D ^a   Meng, Q N ^a   Zheng, W T ^a  

^a JILIN UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

MAGNETRONS; MECHANICAL PROPERTIES; REACTIVE SPUTTERING;

DIRECT CURRENT; PHASE TRANSITIONS; PREFERRED ORIENTATION; REACTIVE MAGNETRON SPUTTERING; SUBSTRATE BIASING;

MAGNETRON SPUTTERING;

EID: 48849110634     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2956706     Document Type: Article

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