Effects of deposition parameters on microstructure of CrN/Si 3N4 nanolayered coatings and their thermal stability

Journal of Physics Condensed Matter

Volumn 17, Issue 41, 2005, Pages 6405-6413

  Bai, Xiaoming ^a   Zheng, Weitao ^a   An, Tao ^a   Jiang, Qing ^a  

^a Jilin University   (China)

Author keywords

[No Author keywords available]

Indexed keywords

COATING TECHNIQUES; ELECTRODEPOSITION; ELECTROMAGNETIC WAVE REFLECTION; MAGNETRON SPUTTERING; MICROSTRUCTURE; MULTILAYERS; POLYCRYSTALLINE MATERIALS; RAPID THERMAL ANNEALING; THERMODYNAMIC STABILITY; TRIBOLOGY; ULTRAHIGH VACUUM; X RAY DIFFRACTION ANALYSIS; X RAYS;

GAS PRESSURE; INTERFACIAL PROPERTIES; MULTILAYER COATINGS; X-RAY REFLECTIVITY;

CHROMIUM COMPOUNDS;

EID: 26244439843     PISSN: 09538984     EISSN: None     Source Type: Journal    
DOI: 10.1088/0953-8984/17/41/011     Document Type: Article

References (20)

1. Derflinger V, Brandle H and Zimmermann H 1999 Surf. Coat. Technol. 113 286
2. Veprek S, Niederhofer A, Moto K, Bolom T, Mannling H-D, Nesladek P, Dollinger G and Bergmaier A 2000 Surf. Coat. Technol. 133/134 152
3. Veprek S, Haussmann M and Reiprich S 1996 J. Vac. Sci. Technol. A 14 46
4. Veprek S 1999 J. Vac. Sci. Technol. A 17 2401
5. Niederhofer A, Bolom T, Nesladek P, Moto K, Eggs C, Patil D S and Veprek S 2001 Surf. Coat. Technol. 146/147 183
6. Ma D, Ma S, Xu K and Veprek S 2005 Mater. Lett. 59 838
7. Veprek S, Haussmann M, Reiprich S, Li S and Dian J 1996 Surf. Coat. Technol. 86/87 394
8. Nose M, Chiou W A, Zhou M, Mae T and Meshii M 2002 J. Vac. Sci. Technol. A 20 823
9. Jagielski J, Khanna A S, Kucinski J, Mishra D S, Racolta P, Sioshansi P, Tobing E, Thereska J, Uglov V, Vilaithong T, Viviente J, Yang S-Z and Zalar A 2000 Appl. Surf. Sci. 156 47
10. Xu J, Hattori K, Seino Y and Kojima I 2002 Thin Solid Films 414 239
11. Martinez E, Sanjines R, Karimi A, Esteve J and Levy F 2004 Surf. Coat. Technol. 180/181 570
12. Chen Y-H, Guruz M, Chung Y-W and Keer L M 2002 Surf. Coat. Technol. 154 162
13. Veprek S, Veprek-Heijman Maritza G J, Karvankova P and Prochazka J 2005 Thin Solid Films 476 1
14. Ying G, Shao J and Fan Z 1993 Chin. J. Lasers 20 900 (in Chinese)
15. Wainfan N and Paratt L G 1960 J. Appl. Phys. 31 1331
16. Sarioglua C, Demirlerb U and Kursat Kazmanlib M 2005 Surf. Coat. Technol. 190 238
17. Lewis D B, Luo Q, Hovsepian P Eh and Munz W-D 2004 Surf. Coat. Technol. 184 225
18. Xu J, Yu L, Azuma Y, Fujimoto T, Umehara H and Kojima I 2002 Appl. Phys. Lett. 81 4139
19. Veprek S and Argon A S 2002 J. Vac. Sci. Technol. B 20 650
20. Yanga S, Wiemannb E and Teera D G 2004 Surf. Coat. Technol. 188/189 662