Comparative study of mechanical and tribological properties of CNx and DLC films deposited by PECVD technique

Surface and Coatings Technology

Volumn 174-175, Issue , 2003, Pages 427-433

  Takadoum, J ^a   Rauch, J Y ^a   Cattenot, J M ^a   Martin, N ^a  

^a Centre National de la Recherche Scientifique   (France)

Author keywords

Carbon nitride; Coating; Diamond like carbon; PECVD; Tribology

Indexed keywords

ADHESION; CARBON NITRIDE; FOURIER TRANSFORM INFRARED SPECTROSCOPY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; TRIBOLOGY; X RAY PHOTOELECTRON SPECTROSCOPY;

HIGH SPEED STEEL SUBSTRATES;

DIAMOND LIKE CARBON FILMS;

COATING; INDUSTRIAL APPLICATION; PLASMA; SURFACE PROPERTY;

EID: 0041326710     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(03)00542-5     Document Type: Article

References (37)

1. Liu A.Y. Cohen M.L. Science 245 1989 841
2. Cuomo J.J. Leary P.A. Yu D. Reuter W. Frisch M. J. Vac. Sci. Technol. 16 1979 299
3. Doll G.L. Heremans J.P. Perry T.A. Mantese J.V. J. Mater. Res. 9 1994 85
4. Hoffman A. Gouzman I. Brener R. Appl. Phys. Lett. 64 1994 845
5. Kusano Y. Evetts J.E. Somekh R.E. Hutchings I.M. Thin Solid Films 332 1998 56
6. Chen L.C. Bhusari D.M. Yang C.Y. et al. Thin Solid Films 303 1997 66
7. Leonhardt A. Gruger H. Selbmann D. Arnold B. Thomas J. Thin Solid Films 332 1998 69
8. Ong C.W. Zhao X.A. Tsang Y.C. Choy C.L. Chan P.W. J. Mater. Sci. 32 1997 2347
9. Niu C. Lu Y.Z. Lieber C.M. Science 261 1993 334
10. Boyd K.J. Marton D. Todorov S.S. et al. J. Vac. Sci. Technol. A 13 1995 2110
11. Hellgren N. Johansson M.P. Broitman E. Hultman L. Sundgren J.E. Phys. Rev. B 59 7 1999 5162
12. de Graaf A. Dinescu G. Longueville J.L. et al. Thin Solid Films 333 1998 29
13. Grill A. Patel V. Diamond Films Technol. 2 2-3 1992 61
14. Chan W.C. Fung M.K. Lai K.H. Bello I. Lee S.T. Lee C.S. J. Non-Cryst. Solids 254 1999 180
15. Koskinen J. J. Appl. Phys. 63 1988 2094
16. Hammer P. Lacerda R.G. Droppa R. Alvarez F. Diamond Relat. Mater. 9 2000 577
17. Grill A. Wear 168 1993 143
18. Liu Y. Erdemi A. Meletis E.I. Surf. Coat. Technol. 82 1996 48
19. Le Huu T. Zaidi H. Paulmier D. Voumard P. Thin Solid Films 290-291 1996 126
20. Bull S.J. Diamond Relat. Mater. 4 1995 827
21. Hoffman A. Brener R. Gouzman I. et al. Diamond Relat. Mater. 4 1995 292
22. Chen L.C. Bhusari D.M. Yang C.Y. et al. Thin Solid Films 303 1997 66
23. Song H.W. Cui F.Z. He X.M. Li W.Z. Li H.D. J. Phys.: Condensed Matter 6 1994 6125
24. Marton D. Boyd K.J. Al-Bayati A.H. Todorov S.S. Rabalais J. Phys. Rev. Lett. 73 1994 118
25. Lujunpan M.Z. Nakayam Y. J. Non-Cryst. Solids 266-269 2000 815
26. Leonhardt A. Gruger H. Selbmann D. Arnold B. Thomas J. Thin Solid Films 332 1998 69
27. Muhl S. Mendez J.M. Diamond Relat. Mater. 8 1999 1809
28. Zou X.R. Xie J.Q. Feng J.Y. Surf. Coat. Technol. 111 1999 119
29. Lu T.R. Chen L.C. Thin Solid Films 332 1998 74
30. Boussetta A. Lu M. Benaoula A. Schultz A. Appl. Phys. Lett. 65 6 1994 696
31. Wixom M.R. J. Am. Ceram. Soc. 73 1990 1686
32. Quiros C. Nunez R. Prieto P. et al. Surf. Coat. Technol. 125 2000 284
33. Spaeth C. Kuln M. Chudoba T. Richter F. Surf. Coat. Technol. 112 1999 140
34. Tajima N. Saze H. Sugimura H. Takai O. Jpn. J. Appl. Phys. 38 1999 L1131
35. Precht W. Pancielejko M. Czyzniewski A. Vacuum 53 1999 109
36. Zheng W.T. Guo J.H. Sjöström H. Sundgren J.E. Phys. Status Solidi A 172 1999 373
37. Grill A. Patel V. Meyerson B.S. Clausing R.E. et al. Diamond and Diamond-Like Films and Coatings 1991 417 Plenum Press New York