Study on the superhardness mechanism of Ti-Si-N nanocomposite films: Influence of the thickness of the Si3N4 interfacial phase

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 23, Issue 1, 2005, Pages 114-117

  Hu, Xiaoping ^a   Zhang, Huijuan ^a   Dai, Jiawei ^a   Li, Geyang ^a   Gu, Mingyuan ^a  

^a SHANGHAI JIAO TONG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTIC MODULI; EPITAXIAL GROWTH; GROWTH (MATERIALS); MULTILAYERS; NANOSTRUCTURED MATERIALS; SURFACE CHEMISTRY;

INTERFACIAL PHASE; NANOCOMPOSITE FILMS; SUPERHARDNESS EFFECTS;

THIN FILMS;

EID: 28844473665     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1821583     Document Type: Article

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