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Thin Solid Films

Volumn 519, Issue 15, 2011, Pages 4842-4848

Tribological and mechanical behaviors of TiN/CNx multilayer films deposited by magnetron sputtering

(5) Liu, D G a Tu, J P a Gu, C D a Chen, R a Hong, C F a

a ZHEJIANG UNIVERSITY (China)

Author keywords

Bilayer period; Hardness; Multilayer; Nitride; Tribological property

Indexed keywords

BALL-ON-DISK; BILAYER PERIOD; CRYSTALLINE REGIONS; DIRECT-CURRENT MAGNETRON SPUTTERING; FRICTION COEFFICIENTS; GROWTH-PROMOTING EFFECTS; HUMID AIR; LAYER MORPHOLOGY; MECHANICAL BEHAVIOR; MULTI-LAYERED FILMS; NANOINDENTATION TESTS; TRIBOLOGICAL PROPERTIES; TRIBOMETERS;

EPITAXIAL GROWTH; FRICTION; HARDNESS; MULTILAYERS; NANOINDENTATION; NITRIDES; PHOTOELECTRON SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; TRANSMISSION ELECTRON MICROSCOPY; TRIBOLOGY; WEAR RESISTANCE; X RAY DIFFRACTION; X RAY PHOTOELECTRON SPECTROSCOPY;

MULTILAYER FILMS;

EID: 79957653361 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2011.01.039 Document Type: Conference Paper

Times cited : (24)

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