Vacuum arc deposition of TiN, NbN and TiN/NbN multi-layer coatings

Surface and Coatings Technology

Volumn 120-121, Issue , 1999, Pages 219-225

  Zhitomirsky, V N ^a   Grimberg, I ^b   Rapoport, L ^c   Travitzky, N A ^a   Boxman, R L ^a   Goldsmith, S ^a   Weiss, B Z ^b  

^a TEL AVIV UNIVERSITY   (Israel)

^b TECHNION ISRAEL INSTITUTE OF TECHNOLOGY   (Israel)

^c HOLON INSTITUTE OF TECHNOLOGY   (Israel)

Author keywords

Microhardness; Niobium; Nitride coatings; Phase composition; Titanium; Vacuum arc deposition

Indexed keywords

DEPOSITION; DIAMOND-LIKE COATING; VACUUM DEPOSITION;

EID: 0033503290     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(99)00382-5     Document Type: Article

References (18)

1. Larsson M., Hollman P., Hendequist P., Hogmark S., Wahlstrom U., Hultman L. Surf. Coat. Technol. 86/87:1996;351.
2. Andrievsky R.A., Anisimova I.A., Anisimov V.P. Thin Solid Films. 205:1991;171.
3. Rutherford K.L., Hatto P.W., Davies C., Hutching I.M. Surf. Coat. Technol. 86/87:1996;472.
4. Larsson M., Bromark M., Hendequist P., Hogmark S. Surf. Coat. Technol. 91:1997;43.
5. Grimberg I., Zhitomirsky V.N., Boxman R.L., Goldsmith S., Weiss B.Z. Surf. Coat. Technol. 109:1998;154.
6. Chu X., Wong M.S., Sproul W.D., Rohde S.L., Barnett S.A. J. Vac. Sci. Technol. A. 10:1992;1604.
7. Hultman L., Wallenberg L.R., Shinn M., Barnett S.A. J. Vac. Sci. Technol. A. 10:1992;1618.
8. Chu X., Barnett S.A., Wong M.S., Sproul W.D. Surf. Coat. Technol. 57:1993;13.
9. Zhitomirsky V.N., Grimberg I., Rapoport L., Travitzky N.A., Boxman R.L., Goldsmith S., Raihel A., Lapsker I., Weiss B.Z. Thin Solid Films. 236:1998;134.
10. Zhitomirsky V.N., Grimberg I., Boxman R.L., Weiss B.Z., Travitzky N.A., Goldsmith S. Surf. Coat. Technol. 94/95:1997;206.
11. Ben-Ami R., Zhitomirsky V.N., Boxman R.L., Goldsmith S. Plasma Sources Sci. Technol. 8:1999;355.
12. Matthews A., Leyland A. Strafford K.N., Subramanian C. Quality Control and Assurance in Advanced Surface Engineering. 1997;41-53 The Institute of Materials, London.
13. File no. 25-1361, JCPDS-ICDD, Niobium Nitride, 1997.
14. Hollman P., Larsson M., Hendequist P., Hogmark S. Surf. Coat. Technol. 91:1997;234.
15. Oks E.M., Anders A., Brown I.G., Dickinson M.R., MacGill R.A. IEEE Trans. Plasma Sci. 34:1996;1174.
16. Cohen Y., Boxman R.L., Goldsmith S. IEEE Trans. Plasma Sci. 17:1989;713.
17. Zhitomirsky V.N., Kaplan L., Boxman R.L., Goldsmith S. Surf. Coat. Technol. 76/77:1995;190.
18. Sproul W.D. Surf. Coat. Technol. 86/87:1996;170.