Atomic environment and interfacial structural order of TiAlN/Mo multilayers

Surface and Coatings Technology

Volumn 187, Issue 2-3, 2004, Pages 393-398

  Tavares, C J ^a   Rebouta, L ^a   Riviere J P ^b   Girardeau, T ^b   Goudeau, P ^b   Alves, E ^c   Barradas, N P ^c  

^a UNIVERSITY OF MINHO   (Portugal)

^b UNIVERSITÉ DE POITIERS   (France)

^c INSTITUTO TECNOLÓGICO E NUCLEAR   (Portugal)

Author keywords

Atomic environment; EXAFS; Multilayers; RBS; Roughness; Simulations

Indexed keywords

ALUMINUM; COMPUTER SIMULATION; MAGNETRON SPUTTERING; MULTILAYERS; RUTHERFORD BACKSCATTERING SPECTROSCOPY;

INTERMIXING; NEGATIVE BIAS VOLTAGE;

TITANIUM COMPOUNDS;

COATING;

EID: 4644362953     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2004.03.052     Document Type: Article

References (17)

1. Hovsepian P.Eh. Münz W.-D. Vacuum 69 2003 27
2. Barradas N.P. Soares J.C. da Silva M.F. Pászti F. Szilágyi E. Nucl. Instrum. Methods B 94 1994 266
3. Tavares C.J. Rebouta L. Alves E.J. Barradas N.P. Pacaud J. Rivière J.P. Nucl. Instrum. Methods B 188 2002 90
4. Behrisch R. Grigull S. Kreissig U. Grötzschel R. Nucl. Instrum. Methods B 136-138 1998 628
5. Barradas N.P. J. Phys., D, Appl. Phys. 34 2001 2109
6. Tavares C.J. Rebouta L. Alves E. Cavaleiro A. Goudeau P. Rivière J.P. Declemy A. Thin Solid Films 377-378 2000 425
7. Tavares C.J. Rebouta L. Rivière J.P. Pacaud J. Garem H. Pischow K. Wang Z. Thin Solid Films 398-399 2001 397
8. Szilágyi E. Nucl. Instrum. Methods Phys. Res., B Beam Interact. Mater. Atoms 161-163 2000 37
9. Barradas N.P. Jeynes C. Webb R.P. Appl. Phys. Lett. 71 1997 291
10. Barradas N.P. Jeynes C. Webb R.P. Kreissig U. Grötzschel R. Nucl. Instrum. Methods B 149 1999 233
11. Mimault J. Faix J.J. Girardeau T. Jaouen M. Tourillon G. Meas. Sci. Technol. 5 1994 482
12. Girardeau T. Bouslykhane K. Mimault J. Villain J.P. Chartier P. Thin Solid Films 283 1996 67
13. Fontaine A. Lagarde P. Naudon A. Raoux D. Spanjaard D. Phila. Mag. B 40 1979 17
14. Rehr J.J. Alberts R.C. Rev. Mod. Phys. 72 2000 621
15. Lee P.A. Pendry J.B. Phys. Rev., B 11 1975 2795
16. McKale A.G. Knapp G.S. Chan S.K. Phys. Rev., B 33 1986 841
17. Petrov I. Adibi F. Greene J.E. Hultman L. Sundgren J.-E. Appl. Phys. Lett. 63 1 1993 36