Crystallization of Si3N4 layers and its influences on the microstructure and mechanical properties of ZrN/Si3N 4 nanomultilayers

Applied Physics Letters

Volumn 89, Issue 12, 2006, Pages

  Dong, Yunshan ^a   Zhao, Wenji ^a   Yue, Jianling ^a   Li, Geyang ^a  

^a SHANGHAI JIAO TONG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; CRYSTAL STRUCTURE; CRYSTALLINE MATERIALS; CRYSTALLIZATION; EPITAXIAL GROWTH; MICROSTRUCTURE; THICKNESS MEASUREMENT; ZIRCONIUM COMPOUNDS;

COLUMNAR CRYSTALS; PSEUDOCRYSTAL STRUCTURES; TEMPLATE EFFECTS; ZRN/SI3N4;

SILICON COMPOUNDS;

EID: 33748956307     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2348092     Document Type: Article

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