Structural and mechanical properties of sputtered cubic and hexagonal NbNx thin films

Surface and Coatings Technology

Volumn 180-181, Issue , 2004, Pages 178-183

  Benkahoul, M ^a   Martinez, E ^a   Karimi, A ^a   Sanjines R ^a   Levy F ^a  

^a EPFL   (Switzerland)

Author keywords

Crystalline structure; Hardness; Morphology; NbN; Young modulus

Indexed keywords

CRYSTALLINE MATERIALS; ELASTIC MODULI; GRAIN SIZE AND SHAPE; HARDNESS; MAGNETRON SPUTTERING; MORPHOLOGY; PARTIAL PRESSURE; SCANNING ELECTRON MICROSCOPY; THIN FILMS; X RAY DIFFRACTION;

ELECTRON PROBE MICROANALYSIS; NANO-INDENTATION;

NIOBIUM COMPOUNDS;

COATING;

EID: 16744364913     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2003.10.040     Document Type: Article

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