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Applied Surface Science

Volumn 257, Issue 23, 2011, Pages 10065-10071

Silicon oxynitride thin films synthesised by the reactive gas pulsing process using rectangular pulses

(4) Aubry, E a Weber, S b Billard, A c Martin, N a

a FEMTO ST INSTITUTE (France)

b INSTITUT JEAN LAMOUR (France)

c UNIVERSITÉ DE TECHNOLOGIE DE BELFORT MONTBÉLIARD (France)

Author keywords

Optical emission spectroscopy; Reactive gas pulsing process; Reactive sputtering

Indexed keywords

ARGON; GASES; MASS SPECTROMETRY; NITRIDES; NITROGEN; OPTICAL EMISSION SPECTROSCOPY; REACTIVE SPUTTERING; SILICA; SILICON NITRIDE; SILICON OXIDES;

CHEMICAL COMPOSITIONS; OXYGEN AND NITROGENS; PREFERENTIAL ADSORPTION; REACTIVE GAS; REAL TIME MEASUREMENTS; SECONDARY NEUTRAL MASS SPECTROMETRY; SILICON OXY-NITRIDE THIN FILMS; SILICON OXYNITRIDE FILMS;

THIN FILMS;

EID: 80051789282 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/j.apsusc.2011.06.141 Document Type: Article

Times cited : (12)

References (56)

1
- 0041738176
- H. El-Oyoun, T. Inokuma, Y. Kurata, and S. Hasegawa Jpn. J. Appl. Phys. 42 2003 3570
- (2003) Jpn. J. Appl. Phys. , vol.42 , pp. 3570
- El-Oyoun, H.¹ Inokuma, T.² Kurata, Y.³ Hasegawa, S.⁴

2
- 33744511133
- F. Rebib, E. Tomasella, S. Aida, M. Dubois, J. Cellier, and M. Jacquet Appl. Surf. Sci. 252 2006 5607
- (2006) Appl. Surf. Sci. , vol.252 , pp. 5607
- Rebib, F.¹ Tomasella, E.² Aida, S.³ Dubois, M.⁴ Cellier, J.⁵ Jacquet, M.⁶

3
- 0039436914
- M.L. Green, E.P. Gusev, R. Degraeve, and E.L. Garfunkel J. Appl. Phys. 90 2001 2057
- (2001) J. Appl. Phys. , vol.90 , pp. 2057
- Green, M.L.¹ Gusev, E.P.² Degraeve, R.³ Garfunkel, E.L.⁴

4
- 0032202694
- L. Pinard, and J.M. Mackowski Thin Solid Films 333 1998 126
- (1998) Thin Solid Films , vol.333 , pp. 126
- Pinard, L.¹ MacKowski, J.M.²

5
- 33747058535
- D. Criado, M.I. Alayo, M.C.A. Fantini, and I. Pereyra J. Non-Cryst. Solids 352 2006 2319
- (2006) J. Non-Cryst. Solids , vol.352 , pp. 2319
- Criado, D.¹ Alayo, M.I.² Fantini, M.C.A.³ Pereyra, I.⁴

6
- 44949153469
- Y. Liu, I.-K. Lin, and X. Zhang Mater. Sci. Eng. A 489 2008 294
- (2008) Mater. Sci. Eng. A , vol.489 , pp. 294
- Liu, Y.¹ Lin, I.-K.² Zhang, X.³

7
- 0022751775
- A. Hashimoto, M. Kobayashi, T. Kamijoh, H. Takano, and M. Sakuta J. Electrochem. Soc. 133 1986 1464
- (1986) J. Electrochem. Soc. , vol.133 , pp. 1464
- Hashimoto, A.¹ Kobayashi, M.² Kamijoh, T.³ Takano, H.⁴ Sakuta, M.⁵

8
- 0037206626
- S. Iwamori, Y. Gotoh, and K. Moorthi Vacuum 68 2003 113
- (2003) Vacuum , vol.68 , pp. 113
- Iwamori, S.¹ Gotoh, Y.² Moorthi, K.³

9
- 0000242720
- J.W. Osenbach, and S.S. Voris J. Appl. Phys. 63 1988 4494
- (1988) J. Appl. Phys. , vol.63 , pp. 4494
- Osenbach, J.W.¹ Voris, S.S.²

10
- 34249107474
- E. Aubry, M.N. Ghazzal, V. Demange, N. Chaoui, D. Robert, and A. Billard Surf. Coat. Technol. 201 2007 7706
- (2007) Surf. Coat. Technol. , vol.201 , pp. 7706
- Aubry, E.¹ Ghazzal, M.N.² Demange, V.³ Chaoui, N.⁴ Robert, D.⁵ Billard, A.⁶

11
- 33846990968
- F. Rebib, E. Tomasella, M. Dubois, J. Cellier, T. Sauvage, and M. Jacquet Thin Solid Films 515 2007 3480
- (2007) Thin Solid Films , vol.515 , pp. 3480
- Rebib, F.¹ Tomasella, E.² Dubois, M.³ Cellier, J.⁴ Sauvage, T.⁵ Jacquet, M.⁶

12
- 80051802783
- L. Pinard, and J.M. Mackowski Appl. Optics 36 1997 22
- (1997) Appl. Optics , vol.36 , pp. 22
- Pinard, L.¹ MacKowski, J.M.²

13
- 0023643195
- X. Qiu, and E. Gyarmati Thin Solid Films 151 1987 223
- (1987) Thin Solid Films , vol.151 , pp. 223
- Qiu, X.¹ Gyarmati, E.²

14
- 0022664280
- M. Serenyi, W. Lauer, and H.U. Habermeier Nucl. Instrum. Methods Phys. Res. B 18 1987 659
- (1987) Nucl. Instrum. Methods Phys. Res. B , vol.18 , pp. 659
- Serenyi, M.¹ Lauer, W.² Habermeier, H.U.³

15
- 84990699597
- D. Schalch, A. Scharmann, and R. Wolfart Phys. Status Solidi A 100 1987 K87
- (1987) Phys. Status Solidi A , vol.100 , pp. 87
- Schalch, D.¹ Scharmann, A.² Wolfart, R.³

16
- 0024731702
- T. Kanata, H. Takakura, and Y. Hamakawa Appl. Phys. A 49 1989 305
- (1989) Appl. Phys. A , vol.49 , pp. 305
- Kanata, T.¹ Takakura, H.² Hamakawa, Y.³

17
- 44649112384
- C. Petitjean, M. Grafouté, C. Rousselot, and J.F. Pierson Surf. Coat. Technol. 202 2008 4825
- (2008) Surf. Coat. Technol. , vol.202 , pp. 4825
- Petitjean, C.¹ Grafouté, M.² Rousselot, C.³ Pierson, J.F.⁴

18
- 0027684513
- A. Billard, and C. Frantz Surf. Coat. Technol. 59 1993 41
- (1993) Surf. Coat. Technol. , vol.59 , pp. 41
- Billard, A.¹ Frantz, C.²

19
- 0033456545
- N. Martin, and C. Rousselot J. Vac. Sci. Technol. A 17 1999 2869
- (1999) J. Vac. Sci. Technol. A , vol.17 , pp. 2869
- Martin, N.¹ Rousselot, C.²

20
- 13844309319
- S. Berg, and T. Nyberg Thin Solid Films 476 2005 215
- (2005) Thin Solid Films , vol.476 , pp. 215
- Berg, S.¹ Nyberg, T.²

21
- 0035387968
- F. Sanchette, and A. Billard Surf. Coat. Technol. 142-144 2001 218
- (2001) Surf. Coat. Technol. , vol.142-144 , pp. 218
- Sanchette, F.¹ Billard, A.²

22
- 0035965965
- N. Martin, O. Banakh, A.M.E. Santo, S. Springer, R. Sanjinés, J. Takadoum, and F. Lévy Appl. Surf. Sci. 185 2001 123
- (2001) Appl. Surf. Sci. , vol.185 , pp. 123
- Martin, N.¹ Banakh, O.² Santo, A.M.E.³ Springer, S.⁴ Sanjinés, R.⁵ Takadoum, J.⁶ Lévy, F.⁷

23
- 50849138550
- N.M.G. Parreira, T. Polcar, N.J.M. Carvalho, and A. Cavaleiro Eur. Phys. J. Appl. Phys. 43 2008 321
- (2008) Eur. Phys. J. Appl. Phys. , vol.43 , pp. 321
- Parreira, N.M.G.¹ Polcar, T.² Carvalho, N.J.M.³ Cavaleiro, A.⁴

24
- 70350646752
- P. Carvalho, L. Cunha, E. Alves, N. Martin, E. Le Bourhis, and F. Vaz J. Phys. D: Appl. Phys. 42 2009 195501
- (2009) J. Phys. D: Appl. Phys. , vol.42 , pp. 195501
- Carvalho, P.¹ Cunha, L.² Alves, E.³ Martin, N.⁴ Le Bourhis, E.⁵ Vaz, F.⁶

25
- 38949203051
- M. Fenker, H. Kappl, and C. Sandu Surf. Coat. Technol. 202 2008 2358
- (2008) Surf. Coat. Technol. , vol.202 , pp. 2358
- Fenker, M.¹ Kappl, H.² Sandu, C.³

26
- 0033311629
- R. Mientus, and K. Ellmer Surf. Coat. Technol. 116-119 1999 1093
- (1999) Surf. Coat. Technol. , vol.116-119 , pp. 1093
- Mientus, R.¹ Ellmer, K.²

27
- 1342347338
- J.-M. Chappé, N. Martin, J.F. Pierson, G. Terwagne, J. Lintymer, J. Gavoille, and J. Takadoum Appl. Surf. Sci. 225 2004 29
- (2004) Appl. Surf. Sci. , vol.225 , pp. 29
- Chappé, J.-M.¹ Martin, N.² Pierson, J.F.³ Terwagne, G.⁴ Lintymer, J.⁵ Gavoille, J.⁶ Takadoum, J.⁷

28
- 25144433544
- W.D. Sproul, D.J. Christie, and D.C. Carter Thin Solid Films 491 2005 1
- (2005) Thin Solid Films , vol.491 , pp. 1
- Sproul, W.D.¹ Christie, D.J.² Carter, D.C.³

29
- 0033148278
- F. Clénet, Ph. Briaud, G. Lempérire, and G. Turban Thin Solid Films 346 1999 290
- (1999) Thin Solid Films , vol.346 , pp. 290
- Clénet, F.¹ Briaud, Ph.² Lempérire, G.³ Turban, G.⁴

30
- 0030379458
- N. Renevier, P. Collignon, H. Michel, and T. Czerwiec Surf. Coat. Technol. 86-87 1996 285
- (1996) Surf. Coat. Technol. , vol.8687 , pp. 285
- Renevier, N.¹ Collignon, P.² Michel, H.³ Czerwiec, T.⁴

31
- 33746973316
- F. Rebib, E. Tomasella, L. Thomas, J. Cellier, T. Sauvage, and M. Jacquet Appl. Surf. Sci. 252 2006 5611
- (2006) Appl. Surf. Sci. , vol.252 , pp. 5611
- Rebib, F.¹ Tomasella, E.² Thomas, L.³ Cellier, J.⁴ Sauvage, T.⁵ Jacquet, M.⁶

32
- 0032795706
- M. Touzeau, D. Pagnon, and J. Bretagne Vacuum 52 1999 33
- (1999) Vacuum , vol.52 , pp. 33
- Touzeau, M.¹ Pagnon, D.² Bretagne, J.³

33
- 0004952617
- F. Debal, J. Bretagne, A. Ricard, M. Jumet, M. Wautelet, J.P. Dauchot, and M. Hecq Surf. Coat. Technol. 98 1998 1387
- (1998) Surf. Coat. Technol. , vol.98 , pp. 1387
- Debal, F.¹ Bretagne, J.² Ricard, A.³ Jumet, M.⁴ Wautelet, M.⁵ Dauchot, J.P.⁶ Hecq, M.⁷

34
- 0033340589
- M. Neuhäuser, S. Bärwulf, H. Hilgers, E. Lugscheider, and M. Riester Surf. Coat. Technol. 116-119 1999 981
- (1999) Surf. Coat. Technol. , vol.116-119 , pp. 981
- Neuhäuser, M.¹ Bärwulf, S.² Hilgers, H.³ Lugscheider, E.⁴ Riester, M.⁵

35
- 0037204387
- V. Vancoppenolle, P.-Y. Jouan, A. Ricard, M. Wautelet, J.-P. Dauchot, and M. Hecq Appl. Surf. Sci. 205 2003 249
- (2003) Appl. Surf. Sci. , vol.205 , pp. 249
- Vancoppenolle, V.¹ Jouan, P.-Y.² Ricard, A.³ Wautelet, M.⁴ Dauchot, J.-P.⁵ Hecq, M.⁶

36
- 39649104353
- M. Furuta, T. Hiramatsu, T. Matsuda, C. Li, H. Furuta, and T. Hirao J. Non-Cryst. Solids 354 2008 1926
- (2008) J. Non-Cryst. Solids , vol.354 , pp. 1926
- Furuta, M.¹ Hiramatsu, T.² Matsuda, T.³ Li, C.⁴ Furuta, H.⁵ Hirao, T.⁶

37
- 50849090596
- G.S. Chen, C.C. Lee, H. Niu, W. Huang, R. Jann, and T. Schütte Thin Solid Films 516 2008 8473
- (2008) Thin Solid Films , vol.516 , pp. 8473
- Chen, G.S.¹ Lee, C.C.² Niu, H.³ Huang, W.⁴ Jann, R.⁵ Schütte, T.⁶

38
- 0023596715
- S. Kadlec, J. Musil, and J. Viskočil Vacuum 37 1986 729
- (1986) Vacuum , vol.37 , pp. 729
- Kadlec, S.¹ Musil, J.² Viskočil, J.³

39
- 0035978472
- A. Billard, D. Mercs, F. Perry, and C. Frantz Surf. Coat. Technol. 140 2001 225
- (2001) Surf. Coat. Technol. , vol.140 , pp. 225
- Billard, A.¹ Mercs, D.² Perry, F.³ Frantz, C.⁴

40
- 33746945021
- P. Carlsson, C. Nender, H. Barankova, and S. Berg J. Vac. Sci. Technol. A 11 1993 1534
- (1993) J. Vac. Sci. Technol. A , vol.11 , pp. 1534
- Carlsson, P.¹ Nender, C.² Barankova, H.³ Berg, S.⁴

41
- 0008234884
- E. Kusano J. Appl. Phys. 70 1991 7089
- (1991) J. Appl. Phys. , vol.70 , pp. 7089
- Kusano, E.¹

42
- 33748791449
- D. Depla, J. Haemers, and R. De Gryse Thin Solid Films 515 2006 468
- (2006) Thin Solid Films , vol.515 , pp. 468
- Depla, D.¹ Haemers, J.² De Gryse, R.³

43
- 80051791700
- pdb:75th ed
- D.R. Lide (Ed.). CRC Handbook of Chemistry and Physics, 75th ed., 1913-1995.
- CRC Handbook of Chemistry and Physics , pp. 1913-1995
- Lide, D.R.¹

44
- 0035387766
- N. Martin, R. Sanjinés, J. Takadoum, and F. Lévy Surf. Coat. Technol. 142-144 2001 615
- (2001) Surf. Coat. Technol. , vol.142-144 , pp. 615
- Martin, N.¹ Sanjinés, R.² Takadoum, J.³ Lévy, F.⁴

45
- 34249063078
- N. Martin, J. Lintymer, J. Gavoille, J.M. Chappé, F. Sthal, J. Takadoum, F. Vaz, and L. Rebouta Surf. Coat. Technol. 201 2007 7733
- (2007) Surf. Coat. Technol. , vol.201 , pp. 7733
- Martin, N.¹ Lintymer, J.² Gavoille, J.³ Chappé, J.M.⁴ Sthal, F.⁵ Takadoum, J.⁶ Vaz, F.⁷ Rebouta, L.⁸

46
- 0031250076
- A. Billard, F. Perry, and C. Frantz Surf. Coat. Technol. 94 1997 345
- (1997) Surf. Coat. Technol. , vol.94 , pp. 345
- Billard, A.¹ Perry, F.² Frantz, C.³

47
- 0031702273
- L. Pekker Thin Solid Films 312 1998 341
- (1998) Thin Solid Films , vol.312 , pp. 341
- Pekker, L.¹

48
- 2442603468
- D. Depla, and R. De Gryse Surf. Coat. Technol. 183 2003 184
- (2003) Surf. Coat. Technol. , vol.183 , pp. 184
- Depla, D.¹ De Gryse, R.²

49
- 2442563569
- D. Depla, and R. De Gryse Surf. Coat. Technol. 183 2003 190
- (2003) Surf. Coat. Technol. , vol.183 , pp. 190
- Depla, D.¹ De Gryse, R.²

50
- 33751038566
- D. Mercs, F. Perry, and A. Billard Surf. Coat. Technol. 201 2006 2276
- (2006) Surf. Coat. Technol. , vol.201 , pp. 2276
- Mercs, D.¹ Perry, F.² Billard, A.³

51
- 0023363293
- S. Ohta, and S. Hattori Thin Solid Films 150 1987 59
- (1987) Thin Solid Films , vol.150 , pp. 59
- Ohta, S.¹ Hattori, S.²

52
- 56249103697
- L.B. Jonsson, T. Nyberg, and S. Berg J. Vac. Sci. Technol. A 17 1999 1827
- (1999) J. Vac. Sci. Technol. A , vol.17 , pp. 1827
- Jonsson, L.B.¹ Nyberg, T.² Berg, S.³

53
- 0038980089
- D.M. Gruen, A.R. Krauss, and M.J. Pellin Rad. Effects 89 1985 113
- (1985) Rad. Effects , vol.89 , pp. 113
- Gruen, D.M.¹ Krauss, A.R.² Pellin, M.J.³

54
- 0024641252
- M.S. Hedge, R. Caracciolo, K.S. Hatton, and J.B. Wachtman Jr. Appl. Surf. Sci. 37 1989 16
- (1989) Appl. Surf. Sci. , vol.37 , pp. 16
- Hedge, M.S.¹ Caracciolo, R.² Hatton, K.S.³ Wachtman, Jr.J.B.⁴

55
- 67249085167
- D. Severin, O. Kappertz, T. Nyberg, S. Berg, A. Pflug, and M. Wuttig J. Appl. Phys. 105 2009 093302
- (2009) J. Appl. Phys. , vol.105 , pp. 093302
- Severin, D.¹ Kappertz, O.² Nyberg, T.³ Berg, S.⁴ Pflug, A.⁵ Wuttig, M.⁶

56
- 33646186368
- D. Severin, O. Kappertz, T. Kubbart, T. Nyberg, S. Berg, A. Pflug, M. Siemers, and M. Wuttig Appl. Phys. Lett. 88 2006 161504
- (2006) Appl. Phys. Lett. , vol.88 , pp. 161504
- Severin, D.¹ Kappertz, O.² Kubbart, T.³ Nyberg, T.⁴ Berg, S.⁵ Pflug, A.⁶ Siemers, M.⁷ Wuttig, M.⁸

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