Optical emission of magnetron discharges as a function of the composition of argon-nitrogen gas mixtures

Surface and Coatings Technology

Volumn 98, Issue 1-3, 1998, Pages 1387-1394

  Debal, F ^a   Bretagne, J ^b   Ricard, A ^b   Jumet, M ^a   Wautelet, M ^a   Dauchot, J P ^a   Hecq, M ^a  

^a UNIVERSITY OF MONS   (Belgium)

^b UNIVERSITÉ PARIS SUD   (France)

Author keywords

Magnetron discharges; Optical emission spectroscopy; Plasma

Indexed keywords

EID: 0004952617     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(97)00258-2     Document Type: Article

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