Optical losses of multilayer stacks synthesized with silicon oxynitride by r.f. magnetron sputtering

Thin Solid Films

Volumn 333, Issue 1-2, 1998, Pages 126-133

  Pinard, L ^a   Mackowski, J M ^a  

^a UNIVERSITÉ LYON 1   (France)

Author keywords

Deposition process; Multilayers; Optical coatings; Optical properties

Indexed keywords

LIGHT ABSORPTION; LIGHT SCATTERING; MAGNETRON SPUTTERING; OPTICAL COATINGS; SILICA; SILICON NITRIDE;

OPTICAL LOSSES; SILICON OXYNITRIDE;

MULTILAYERS;

EID: 0032202694     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(98)00850-5     Document Type: Article

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