ZrOxNy decorative thin films prepared by the reactive gas pulsing process

Journal of Physics D: Applied Physics

Volumn 42, Issue 19, 2009, Pages

  Carvalho, Pedro ^a   Cunha, Luis ^a   Alves, Eduardo ^b   Martin, Nicolas ^c   Le Bourhis, Eric ^d   Vaz, Filipe ^a  

^a UNIVERSITY OF MINHO   (Portugal)

^b INSTITUTO TECNOLÓGICO E NUCLEAR   (Portugal)

^c UNIVERSITÉ DE FRANCHE COMTÉ   (France)

^d UNIVERSITÉ DE POITIERS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLINE PHASIS; DC REACTIVE MAGNETRON SPUTTERING; METALLIC TARGETS; NITROGEN FLOW RATES; OPTICAL AND ELECTRICAL PROPERTIES; OXYNITRIDES; PERIODIC SIGNAL; REACTIVE GAS; SMOOTH TRANSITIONS; STRUCTURAL VARIATIONS;

ARGON; ELECTRIC PROPERTIES; MECHANICAL PROPERTIES; METALLOIDS; NITRIDES; OPTICAL PROPERTIES; OXYGEN; THIN FILMS; ZIRCONIUM ALLOYS;

ZIRCONIUM;

EID: 70350646752     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/42/19/195501     Document Type: Article

References (43)

1. Graham M E and Sproul W D 1994 Proc. SVC 37th Annual Technical Conf. (Boston, MA, 8-13 May 1994) p 275
2. Tsiogas C D and Avaritsiotis J N 1992 J. Appl. Phys. 71 5173
3. Kinbara A, Kusano E and Baba S 1992 J. Vac. Sci. Technol. A 10 1483
4. Hohnke D K, Schmatz D J and Hurley M D 1984 Thin Solid Films 118 301
5. Westwood W D, Maniv S and Scanlon P J 1983 J. Appl. Phys. 54 6841
6. Berg S, Blom H O, Larsson T and Nender C 1987 J. Vac. Sci. Technol. A 5 202
7. Affinito J and Parsons R R 1984 J. Vac. Sci. Technol. A 2 1275
8. Okamoto A and Serikawa T 1986 Thin Solid Films 137 143
9. Spencer A G, Howson R P and Lewin R W 1988 Thin Solid Films 158 141
10. Sproul W D, Christie D J and Carter D C 2005 Thin Solid Films 491 1
11. Este G and Westwood W D 1984 J. Vac. Sci. Technol. A 00202 1238
12. Hmiel A F 1985 J. Vac. Sci. Technol. A 3 592
13. Billard A, Mercs D, Perry F and Frantz C 2001 Surf. Coat. Technol. 140 225
14. Schiller S, Beister G and Sieber W 1984 Thin Solid Films 111 259
15. Aronson A J, Chen D and Class W H 1980 Thin Solid Films 72 535
16. US Patents 4,428,811 and 4,428,812
17. Howson R P, Danson N and Safi I 1999 Thin Solid Films 351 32
18. Martin N, Lintymer J, Gavoille J and Takadoum J 2002 J. Mater. Sci. 37 4327
19. Sproul W D 1987 Surf. Coat. Technol. 33 73
20. Vaz F, Carvalho P, Cunha L, Rebouta L, Moura C, Alves E, Ramos A R, Cavaleiro A, Goudeau Ph and Rivière J P 2004 Thin Solid Films 469-470 11
21. Carvalho P, Vaz F, Rebouta L, Carvalho S, Cunha L, Goudeau Ph, Rivière J P, Alves E and Cavaleiro A 2005 Surf. Coat. Technol. 200 748
22. Carvalho P et al 2005 J. Appl. Phys. 98 023715
23. Carvalho P, Chappé J M, Cunha L, Lanceros-Méndez S, Alpuim P, Vaz F, Alves E, Rousselot C, Espinós J P and Gonzlez-Elipe A R 2008 J. Appl. Phys. 103 104907
24. Martin N, Lintymer J, Gavoille J, Chappé J M, Sthal F, Takadoum J, Vaz F and Rebouta L 2007 Surf. Coat. Technol. 201 7720
25. Ramos A R, Pal A, Rijniers L, Da Silva M F and Soares J C 2002 Nucl. Instrum. Methods B 190 95
26. Sproul W D, Graham M E, Rudnik P J and Wong M S 1997 Surf. Coat. Technol. 89 10
27. Schiller H, Heisig U, Beister G, Steinfelder K, Strumpfel J, Korndorfer C and Sieber W 1984 Thin Solid Films 118 255
28. Safi I 2000 Surf. Coat. Technol. 127 203
29. Martin N, Lintymer J, Gavoille J, Chappé J M, Sthal F, Takadoum J, Vaz F and Rebouta L 2007 Surf. Coat. Technol. 201 7727
30. Martin N, Lintymer J, Gavoille J, Chappé J M, Sthal F, Takadoum J, Vaz F and Rebouta L 2007 Surf. Coat. Technol. 201 7733
31. D R Lide (ed) 2003-2004 Handbook of Chemistry and Physics 84th edn (Boca Raton, FL: CRC Press) pp 5-23
32. Ma X, Li C, Bai K, Wu P and Zhang W 2004 J. Alloys Compounds 373 194
33. Delin A, Eriksson O, Ahuja R, Johansson B, Brooks M S S, Gasche T, Auluck S and Wills J M 1996 Phys. Rev. B 54 1673
34. Karlsson B, Shimshock R P, Seraphin B O and Haygarth J C 1983 Sol. Energy Mater. 7 401
35. Veszeilei M, Andersson K, Ribbing C G, Järrendahl K and Arwin H 1994 Appl. Opt. 33 1993
36. Ohring M 1992 The Materials Science of Thin Films (San Diego, CA: Academic)
37. Pierson J F, Bertran F, Bauer J P and Jolly J 2001 Surf. Coat. Technol. 142-144 906
38. Miloev I, Strehblow H H and Navinsek B 1997 Thin Solid Films 203 246
39. Schwarz K, Ripplinger H and Neckel A 1982 Z. Phys. B 48 79
40. Bazhanov D I, Knizhnik A A, Safonov A A, Bagatur'yants A A, Stoker M W and Korkin A A 2005 J. Appl. Phys. 97 044108
41. Haines J, Léger J M and Bocquillon G 2001 Annu. Rev. Mater. Res. 31 1
42. Auger M A, Araiza J J, Falcony C, Snchez O and Albella J M 2007 Vacuum 81 1462
43. Mitsuo A, Mori T, Setsuhara Y, Miyake S and Aizawa T 2003 Nucl. Instrum. Methods B 206 366