Spectroscopic study and modelling of a reactive magnetron discharge in Ar/O2 and in air

Vacuum

Volumn 52, Issue 1-2, 1999, Pages 33-40

  Touzeau, M ^a   Pagnon, D ^a   Bretagne, J ^a  

^a UNIVERSITÉ PARIS SUD   (France)

Author keywords

[No Author keywords available]

Indexed keywords

AIR; ARGON; ELECTRIC DISCHARGES; EMISSION SPECTROSCOPY; HYSTERESIS; MAGNETRON SPUTTERING; MATHEMATICAL MODELS; NITROGEN; OXIDATION; OXYGEN;

OPTICAL EMISSION SPECTROSCOPY; REACTIVE MAGNETRON DISCHARGES;

PLASMAS;

EID: 0032795706     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0042-207x(98)00226-7     Document Type: Article

References (8)

1. Berg S, Larsson T, Blom HO. J. Vac. Sci. Technol. 1986;A4:594.
2. Berg S, Larsson T, Nender C, Blom HO. J. Appl. Phys. 1988;63:887.
3. Musil J, Kadlec S, Viskocil J, Valvoda V. Thin Solid Films 1988;167:107.
4. Guimaraes F, Bretagne J. Plasma Sources Sci. Technol. 1993;2:127.
5. Guimaraes F, Almeida JB, Bretagne J. Plasma Sources Sci. Technol. 1993;2:138.
6. Gousset G, Ferreira CM, Pinheiro M, Sa PA, Touzeau M, Vialle M, Loureiro J. J. Phys. D: Appl. Phys. 1991;24:290.
7. Trennepohl W, Jr, Bretagne J, Gousset G, Pagnon D, Touzeau M. Plasma Sources Sci. Technol. 1996;5:607.
8. Eliason B, Kogelschatz V. Brown Bowery Report No. KLR86-11C, 1986.