High-mobility low-voltage ZnO and Li-doped ZnO transistors based on ZrO2 high-k dielectric grown by spray pyrolysis in ambient air

Advanced Materials

Volumn 23, Issue 16, 2011, Pages 1894-1898

  Adamopoulos, George ^a   Thomas, Stuart ^a   Wöbkenberg, Paul H ^a   Bradley, Donal D C ^a   McLachlan, Martyn A ^a   Anthopoulos, Thomas D ^a  

^a IMPERIAL COLLEGE LONDON   (United Kingdom)

Author keywords

high k dielectrics; oxide transistors; spray pyrolysis; ZnO

Indexed keywords

AMBIENT AIR; DOPED ZNO; ELECTRON TRANSPORTING; HIGH MOBILITY; HIGH-K DIELECTRIC; INDIUM TIN OXIDE ELECTRODES; LOW-VOLTAGE; OPERATING VOLTAGE; ZNO;

DIELECTRIC MATERIALS; ELECTRODES; ELECTRON MOBILITY; INDIUM COMPOUNDS; THIN FILM TRANSISTORS; TIN; TIN OXIDES; ZINC OXIDE; ZIRCONIUM ALLOYS;

SPRAY PYROLYSIS;

BORON DERIVATIVE; INDIUM TIN OXIDE; LITHIUM; TIN DERIVATIVE; ZINC OXIDE; ZIRCONIUM; ZIRCONIUM DIBORIDE;

AIR; ARTICLE; CHEMISTRY; ELECTRICITY; SEMICONDUCTOR;

AIR; BORON COMPOUNDS; ELECTRICITY; LITHIUM; TIN COMPOUNDS; TRANSISTORS, ELECTRONIC; ZINC OXIDE; ZIRCONIUM;

EID: 79955045015     PISSN: 09359648     EISSN: 15214095     Source Type: Journal    
DOI: 10.1002/adma.201003935     Document Type: Article

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