Discovery of a useful thin-film dielectric using a composition-spread approach

Nature

Volumn 392, Issue 6672, 1998, Pages 162-164

  Van Dover, R B ^a   Schneemeyer, L F ^a   Fleming, R M ^a  

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; COMPOSITION; ELECTRIC FIELDS; ELECTRIC INSULATING MATERIALS; INTEGRATED CIRCUITS; MATERIALS TESTING; OXIDES; PERMITTIVITY;

COMPOSITION SPREAD APPROACH; HIGH BREAKDOWN FIELD; SILICON DIOXIDE;

DIELECTRIC FILMS;

SILICON DIOXIDE;

ARTICLE; DEVICE; DIELECTRIC CONSTANT; ELECTRONICS; FILM; PRIORITY JOURNAL; TECHNOLOGY;

EID: 0032510515     PISSN: 00280836     EISSN: None     Source Type: Journal    
DOI: 10.1038/32381     Document Type: Article

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