Dual-stage vertical feedback for high-speed scanning probe microscopy

IEEE Transactions on Control Systems Technology

Volumn 19, Issue 1, 2011, Pages 156-165

  Fleming, Andrew J ^a  

^a UNIVERSITY OF NEWCASTLE   (Australia)

Author keywords

Atomic force microscopy; dual stage; high speed

Indexed keywords

BANDWIDTH LIMITATION; CONSTANT-CURRENT; DUAL STAGE; FEEDBACK CONTROLLER; FEEDBACK ERROR; FEEDBACK GAIN; FEEDBACK SYSTEMS; HIGH SPEED SCANNING; HIGH-SPEED; LOW FREQUENCY; MECHANICAL RESONANCE; SCANNING PROBE MICROSCOPE; SPEED INCREASE; TIP-SAMPLE INTERACTION; TOPOGRAPHIC INFORMATION;

ATOMIC FORCE MICROSCOPY; BANDWIDTH; IMAGE QUALITY; INTERFACES (MATERIALS); PROBES; SCANNING TUNNELING MICROSCOPY; SPEED;

SCANNING;

EID: 78650812904     PISSN: 10636536     EISSN: None     Source Type: Journal    
DOI: 10.1109/TCST.2010.2040282     Document Type: Article

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