Improving the Speed of AFM by Mechatronic Design and Modern Control Methods

Technisches Messen

Volumn 76, Issue 5, 2009, Pages 266-273

  Schitter, Georg ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

AFM; Control; Nanotechnology; Scanning probe; SPM

Indexed keywords

AFM; DYNAMIC BEHAVIOURS; IMAGING ARTIFACTS; MECHATRONIC DESIGN; MODERN CONTROL; ORDERS OF MAGNITUDE; SCANNING PROBES; SPM;

ATOMIC FORCE MICROSCOPY; CONTROL; NANOTECHNOLOGY; SCANNING;

DIES;

EID: 67649962966     PISSN: 01718096     EISSN: None     Source Type: Journal    
DOI: 10.1524/teme.2009.0967     Document Type: Conference Paper

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