Sensorless vibration suppression and scan compensation for piezoelectric tube nanopositioners

IEEE Transactions on Control Systems Technology

Volumn 14, Issue 1, 2006, Pages 33-44

  Fleming, Andrew J ^a   Moheimani, S O Reza ^a  

^a UNIVERSITY OF NEWCASTLE   (Australia)

Author keywords

Charge control; Hysteresis; Nanopositioning; Piezoelectric tube; Scan compensation; Scanning probe microscope; Shunt damping

Indexed keywords

AMPLIFIERS (ELECTRONIC); ELECTRON TUBES; HYSTERESIS; NANOTECHNOLOGY; NANOTUBES; VIBRATIONS (MECHANICAL);

CHARGE CONTROL; NANOPOSITIONING; PIEZOELECTRIC TUBE; SCAN COMPENSATION; SCANNING PROBE MICROSCOPE; SHUNT DAMPING;

PIEZOELECTRIC DEVICES;

EID: 32944468063     PISSN: 10636536     EISSN: None     Source Type: Journal    
DOI: 10.1109/TCST.2005.860511     Document Type: Article

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