High-speed serial-kinematic SPM scanner: design and drive considerations

Asian Journal of Control

Volumn 11, Issue 2, 2009, Pages 144-153

  Leang, Kam K ^a   Fleming, Andrew J ^b  

^a Reno   (United States)

^b UNIVERSITY OF NEWCASTLE   (Australia)

Author keywords

High speed nanopositioning; Piezoactuator; Scanning probe microscope

Indexed keywords

ATOMIC FORCE MICROSCOPY; PIEZOELECTRIC ACTUATORS; SCANNING PROBE MICROSCOPY; SPEED;

HIGH SPEED SCANNING; HIGH-SPEED SERIAL; MECHANICAL RESONANCE FREQUENCY; NANO-POSITIONING; PIEZO ACTUATOR; PIEZOELECTRIC STACK ACTUATORS; TIME LAPSE IMAGES; TRAJECTORY DESIGNS;

SCANNING;

EID: 70350444482     PISSN: 15618625     EISSN: None     Source Type: Journal    
DOI: 10.1002/asjc.90     Document Type: Article

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