An integrated approach to piezoactuator positioning in high-speed atomic force microscope imaging

Review of Scientific Instruments

Volumn 79, Issue 7, 2008, Pages

  Yan, Yan ^a   Wu, Ying ^a   Zou, Qingze ^a   Su, Chanmin ^b  

^a Iowa State University   (United States)

^b VEECO INSTRUMENTS INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ATOMIC FORCE MICROSCOPY; ATOMIC PHYSICS; ATOMS; EXTREME ULTRAVIOLET LITHOGRAPHY; INTEGRATED CONTROL; SCANNING; SPEED; STRESS INTENSITY FACTORS;

ACTUATOR CONTROL; ADVANCED CONTROLLING; AFM IMAGING; AFM PROBE; ATOMIC FORCE MICROSCOPE; HARDWARE PLATFORMS; HIGH SPEEDS; INTEGRATED APPROACH; ITERATIVE CONTROL; LARGE SIZES; LATERAL SCANNING; NONLINEAR HYSTERESIS; PIEZO ACTUATORS; POSITIONING ERRORS; PRECISION POSITIONING; PROBE-SAMPLE INTERACTIONS; SCAN RATES; VIBRATIONAL DYNAMICS;

IMAGING TECHNIQUES;

EID: 49149111739     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2956980     Document Type: Article

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