Control of tip-to-sample distance in atomic force microscopy: A dual-actuator tip-motion control scheme

Review of Scientific Instruments

Volumn 78, Issue 9, 2007, Pages

  Jeong, Younkoo ^a   Jayanth, G R ^a   Menq, Chia Hsiang ^a  

^a Ohio State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; BANDWIDTH; CANTILEVER BEAMS; CONTROL SYSTEMS; DYNAMICS; MOTION CONTROL; POSITION CONTROL;

CANTILEVERS BANDWIDTH; MAGNETIC ACTUATION; TIP-MOTION CONTROL SYSTEM; Z SCANNER;

ATOMIC FORCE MICROSCOPY;

EID: 34848928678     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2785158     Document Type: Article

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