Dual integrated actuators for extended range high speed atomic force microscopy

Applied Physics Letters

Volumn 75, Issue 11, 1999, Pages 1637-1639

  Sulchek, T ^a   Minne, S C ^a   Adams, J D ^a   Fletcher, D A ^a   Atalar, A ^a   Quate, C F ^a   Adderton, D M ^b  

^a STANFORD UNIVERSITY   (United States)

^b Nanodevices Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0041525093     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.124779     Document Type: Article

References (11)

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