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The diameters of the XPS beam (≈400 μm) and Kelvin-probe tip (≈2000 mu;m) are much larger than the Si NWs' top and base widths (70 nm and 200 nm, respectively). These discrepancies introduce a majority of signals that do not relate to the FETs' Si NW channel. To overcome this problem, XPS and Kelvin-probe measurements were carried out on 2D Si(111) substrates, which have much larger area than the diameters of both the XPS beam and Kelvin-probe tip. It should be noted that the exposed surface of the trapezoidal Si NW contains >70% (111) facets.
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The diameters of the XPS beam (≈400 μm) and Kelvin-probe tip (≈2000 mu;m) are much larger than the Si NWs' top and base widths (70 nm and 200 nm, respectively). These discrepancies introduce a majority of signals that do not relate to the FETs' Si NW channel. To overcome this problem, XPS and Kelvin-probe measurements were carried out on 2D Si(111) substrates, which have much larger area than the diameters of both the XPS beam and Kelvin-probe tip. It should be noted that the exposed surface of the trapezoidal Si NW contains >70% (111) facets.
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The FWHM is a useful tool to support the identification of peak elements and to give accurate integrals of the peak area, thus increasing the accuracy of the calculation of the surface coverage
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The FWHM is a useful tool to support the identification of peak elements and to give accurate integrals of the peak area, thus increasing the accuracy of the calculation of the surface coverage.
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69
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73349092977
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The adventitious species were observed equally for all samples. Comparing the oxidation resistance of the different samples could thus be attributed to the monolayers rather than from the additional (contamination) adlayer
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The adventitious species were observed equally for all samples. Comparing the oxidation resistance of the different samples could thus be attributed to the monolayers rather than from the additional (contamination) adlayer.
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