Tungsten-based SOI microhotplates for smart gas sensors

Journal of Microelectromechanical Systems

Volumn 17, Issue 6, 2008, Pages 1408-1417

  Ali, Syed Z ^a   Udrea, Florin ^a   Milne, William I ^a   Gardner, Julian W ^b  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

^b UNIVERSITY OF WARWICK   (United Kingdom)

Author keywords

Gas sensors; Microhotplates; Silicon on insulator (SOI); Tungsten

Indexed keywords

CHEMICAL SENSORS; GAS DETECTORS; NETWORKS (CIRCUITS); REACTIVE ION ETCHING; SEMICONDUCTING SILICON COMPOUNDS; SENSORS; SILICON; TUNGSTEN;

ANALYTICAL ANALYSIS; CIRCUIT INTEGRATIONS; CMOS PROCESSES; DC POWER CONSUMPTIONS; DEEP REACTIVE ION ETCHINGS; ELECTROTHERMAL CHARACTERIZATIONS; ELECTROTHERMAL SIMULATIONS; FAST TRANSIENTS; FULLY INTEGRATED; GAS SENSORS; HIGH OPERATING TEMPERATURES; HIGH REPRODUCIBILITY; HIGH TEMPERATURES; INITIAL TESTS; JUNCTION TEMPERATURES; LOW COSTS; MECHANICAL STRENGTHS; MICROHOTPLATES; RESISTIVE GAS SENSORS; RESISTIVE HEATERS; RISE TIMES; SILICON ON INSULATOR (SOI); SILICON ON INSULATORS; THERMAL STABILITIES;

SILICON WAFERS;

EID: 57449090593     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2008.2007228     Document Type: Article

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