Mechanical stress in thin film microstructures on silicon substrate

Vacuum

Volumn 80, Issue 1-3, 2005, Pages 236-240

  Resnik, D ^a   Aljancic U ^a   Vrtacnik D ^a   Mozek M ^a   Amon, S ^a  

^a UNIVERSITY OF LJUBLJANA   (Slovenia)

Author keywords

Mechanical stress; Silicon microstructures; Thin films

Indexed keywords

DIELECTRIC PROPERTIES OF SOLIDS; MICROSTRUCTURE; SENSORS; SILICON; STOICHIOMETRY; STRESSES; SUBSTRATES;

BILAYERS; MECHANICAL STRESS; SILICON MICROSTRUCTURES; STACKED LAYERS;

THIN FILMS;

EID: 25444532749     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2005.08.001     Document Type: Conference Paper

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