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Volumn 1, Issue , 2007, Pages 418-421
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Smart chemical sensor application of ZnO nanowires grown on CMOS compatible SOI microheater platform
a b c c d b a c |
Author keywords
CMOS compatible SOI microheater; Smart chemical sensor and sol gel growth; ZnO nanowire
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Indexed keywords
CHEMICAL SENSORS;
CMOS INTEGRATED CIRCUITS;
LOW TEMPERATURE EFFECTS;
SILICON ON INSULATOR TECHNOLOGY;
SOL-GEL PROCESS;
ZINC OXIDE;
COMPATIBLE MICROHEATERS;
MICROHEATERS;
NANOWIRES GROWTH;
SOL-GEL GROWTH;
ZNO NANOWIRES;
NANOWIRES;
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EID: 34548012387
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (1)
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References (6)
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