Thermal properties of suspended porous silicon micro-hotplates for sensor applications

Sensors and Actuators, B: Chemical

Volumn 95, Issue 1-3, 2003, Pages 78-82

  Tsamis, Christos ^a   Nassiopoulou, Androula G ^a   Tserepi, Angeliki ^a  

^a INSTITUTE OF NANOSCIENCE AND NANOTECHNOLOGY   (Greece)

Author keywords

Micro hotplates; Porous silicon; Thermal sensors

Indexed keywords

ELECTRIC POWER UTILIZATION; ETCHING; POROUS SILICON; SILICON NITRIDE;

HIGH DENSITY PLASMA REACTORS;

CHEMICAL SENSORS;

EID: 0043236460     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(03)00409-X     Document Type: Conference Paper

References (8)

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6. C. Tsamis, A. Tserepi, A.G. Nassiopoulou, Fabrication of suspended porous silicon micro-hotplates for thermal sensor applications, in: Proceedings of the Porous Silicon Science and Technology (PSST-2002), Spain, 2002, pp. 111-115.
7. C. Tsamis, A. Tserepi, A.G. Nassiopoulou, Method for the fabrication of suspended porous silicon microstructures and application in gas sensors, PCT Patent Pending.
8. C. Tsamis, A. Tserepi, A.G. Nassiopoulou, A novel method for the fabrication of suspended porous silicon membranes for chemical sensors, in: Proceedings of the International Meeting on Chemical Sensors, IMCS 2002, Boston, USA, 2002.