Integration of MOX gas sensors on polyimide hotplates

Sensors and Actuators, B: Chemical

Volumn 130, Issue 1, 2008, Pages 430-435

  Briand, D ^a   Colin, S ^a   Courbat, J ^a   Raible, S ^b   Kappler, J ^b   de Rooij, N F ^a  

^a UNIVERSITY OF NEUCHÂTEL   (Switzerland)

^b AppliedSensor GmbH   (Germany)

Author keywords

Gas sensors; Metal oxide (MOX); Plastic gas sensors; Polyimide hotplates; Polymeric gas sensors; Wafer level packaging

Indexed keywords

ELECTRIC POWER UTILIZATION; POLYIMIDES; SILICON;

PLATINUM ELECTRODES; POLYIMIDE MEMBRANES; THERMAL SIMULATIONS;

CHEMICAL SENSORS;

EID: 40749108576     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2007.09.013     Document Type: Article

References (11)

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