An integrated surface micromachined convex microhotplate structure for tin oxide gas sensor array

IEEE Sensors Journal

Volumn 7, Issue 12, 2007, Pages 1720-1726

  Yan, Gui Zhen ^b   Bermak, Amine ^a   Chan, Philip C H ^a  

^a HONG KONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Hong Kong)

^b PEKING UNIVERSITY   (China)

Author keywords

Convex microhotplates (MHPs); gas sensor array; membrane stress; tin oxide

Indexed keywords

EID: 85008025153     PISSN: 1530437X     EISSN: 15581748     Source Type: Journal    
DOI: 10.1109/JSEN.2007.908919     Document Type: Article

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