Thermal characterisation of micro-hotplates used in sensor structures

Superlattices and Microstructures

Volumn 35, Issue 3-6, 2004, Pages 455-464

  Furjes P ^a   Ducs Cs ^a   Adam M ^a   Zettner, J ^b   Barsony I ^a  

^a RESEARCH INSTITUTE FOR TECHNICAL PHYSICS AND MATERIALS SCIENCE   (Hungary)

^b Thermosensorik GmbH   (Germany)

Author keywords

Calorimetric flow sensor; Micro hotplate; Pellistor; Thermal analysis

Indexed keywords

ALUMINUM COMPOUNDS; CALORIMETERS; CAPACITANCE; CATALYST ACTIVITY; KAOLIN; MATHEMATICAL MODELS; MICROMACHINING; OXIDATION; RESISTORS; SENSORS; SILICON; STOICHIOMETRY; THERMOANALYSIS;

CALORIMETRIC FLOW SENSORS; LOW-EXPLOSION-LEVEL (LEL); LPCVD; MICRO-HOTPLATE; PELLISTORS;

SUPERLATTICES;

EID: 4344626064     PISSN: 07496036     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.spmi.2003.09.007     Document Type: Conference Paper

References (5)

1. Krebs P., Grisel A. A low-power integrated catalithic gas sensor. Sensors and Actuators B. 13:1993;155-158.
2. Fürjes P., et al. Materials and processing for realisation of micro-hotplates operated at elevated temperature. Journal of Micromechanics and Microengineering. 12:2002.
3. Kaltsas G., Nassiopoulou A.G. Novel C-MOS compatible monolithic silicon gas-flow sensor with porous silicon thermal isolation. Sensors and Actuators A. 76:1999;133-138.
4. Vízváry Zs., Fürjes P., Bársony I. Thermomechanical analysis of hotplates by FEM. Microelectronics Journal. 32:2001;833-837.
5. Huth S., et al., Breitenstein O., Huber A. Lock-in IR-thermography - A novel tool for material and device characterization. Solid State Phenomenan. 82-84:2002;741-746.