Thermal modelling and characterisation of micropower chemoresistive silicon sensors

Sensors and Actuators, B: Chemical

Volumn 45, Issue 1, 1997, Pages 19-26

  Pike, Andrew ^a   Gardner, Julian W ^a  

^a UNIVERSITY OF WARWICK   (United Kingdom)

Author keywords

Gas sensor; Micro filament; Micro hotplates; Thermal sensor

Indexed keywords

CHEMICAL SENSORS; ELECTRIC POWER SUPPLIES TO APPARATUS; ELECTRIC RESISTANCE MEASUREMENT; HIGH TEMPERATURE APPLICATIONS; MICROELECTRONIC PROCESSING; PORTABLE EQUIPMENT;

MICRO FILAMENT; MICRO HOTPLATES; MICROPOWER CHEMORESISTIVE SILICON SENSORS; THERMAL SENSORS;

SILICON SENSORS;

EID: 0031275891     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(97)00261-X     Document Type: Article

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