Design and optimisation of a high-temperature silicon micro-hotplate for nanoporous palladium pellistors

Microelectronics Journal

Volumn 34, Issue 2, 2003, Pages 115-126

  Lee, S M ^a   Dyer, D C ^a   Gardner, J W ^a  

^a UNIVERSITY OF WARWICK   (United Kingdom)

Author keywords

Catalytic gas sensor; Pellistor; Silicon micro hotplate

Indexed keywords

CATALYSTS; CHEMICAL SENSORS; MESOPOROUS MATERIALS; OPTIMIZATION; PALLADIUM; SEMICONDUCTING SILICON;

PELLISTORS; SILICON MICRO-HOTPLATES;

MICROSENSORS;

EID: 0037303982     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0026-2692(02)00153-2     Document Type: Article

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