Development of ultra low power consumption hotplates for gas sensing applications

Proceedings of IEEE Sensors

Volumn , Issue , 2006, Pages 243-246

  Elmi, I ^a   Zampolli, S ^a   Cozzani, E ^a   Passini, M ^a   Cardinali, G C ^a   Severi, M ^a  

^a CNR Consiglio Nazionale delle Ricerche   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

GAS DETECTORS; GAS SENSING ELECTRODES; METALLIC COMPOUNDS; METALS; NONMETALS; OPTICAL DESIGN; SENSORS; SILICON;

BULK SILICON MICROMACHINING; DEVICE DESIGNS; FABRICATION PROCESSES; FUNCTIONAL BEHAVIORS; GAS-SENSING APPLICATIONS; HOT-PLATES; METAL OXIDE GAS SENSORS; SHAPE AND SIZE; TIME CONSTANTS; TRANSIENT TEMPERATURES; ULTRA LOW POWER;

CHEMICAL SENSORS;

EID: 48349099089     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2007.355767     Document Type: Conference Paper

References (4)

1. S. Semanock "Microhotplate platform for chemioal sensors research", Sens. and Aot. B 77 (2001), 579-591.
2. P.C.H. Chan "An integrated gas sensor technology using surface micromachining", Sens, and Act. B 82 (2002), 277-283.
3. J.Wollenstein "A novel single chip thin film metal oxide array", Sens. and Act. B 93 (2003), 350-355.
4. M. Yaowu "Micro-machined gas sensors array based on metal film micro-heater", Sens. and Act. B 79(2001), 175-181.