A particle-in-cell Monte Carlo simulation of an rf discharge in methane: Frequency and pressure features of the ion energy distribution function

Plasma Sources Science and Technology

Volumn 15, Issue 3, 2006, Pages 402-409

  Proshina, O V ^a   Rakhimova, T V ^a   Rakhimov, A T ^a  

^a MOSCOW STATE UNIVERSITY   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; DIAMOND LIKE CARBON FILMS; ELECTRIC DISCHARGES; ION SOURCES; MONTE CARLO METHODS;

ELASTIC SCATTERING; GAS PRESSURES; ION ENERGY DISTRIBUTION FUNCTIONS (IEDF); RESONANT CHARGE TRANSFER;

METHANE;

EID: 33745622188     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/15/3/015     Document Type: Article

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