Modelling of the dual frequency capacitive sheath in the intermediate pressure range

Journal of Physics D: Applied Physics

Volumn 37, Issue 10, 2004, Pages 1451-1458

  Boyle, P C ^a   Robiche, J ^b   Turner, M M ^a  

^a DUBLIN CITY UNIVERSITY   (Ireland)

^b ECOLE POLYTECHNIQUE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

COLLISION AVOIDANCE; CONTROL NONLINEARITIES; COUPLED CIRCUITS; ELECTRIC POTENTIAL; ELECTRIC REACTORS; FREQUENCY AGILITY; MODELS; PRESSURE EFFECTS;

CAPACITIVE SHEATH; DUAL FREQUENCY; ION DYNAMICS; PLASMA FREQUENCY;

PLASMA SHEATHS;

EID: 2542536177     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/37/10/006     Document Type: Article

References (24)

1. Lieberman M and Lichtenberg A 1994 Principles of Plasma Discharges and Materials Processing (New York: Wiley)
2. Lieberman M A, Booth J P, Chabert P, Rax J M and Turner M M 2002 Plasma Sources Sei. Technol. 11 283-93
3. Löwe H et al 1991 J. Vac. Sei. Technol. A 9 3090-9
4. Kitajima T, Takeo Y and Makabe T 1999 J. Vac. Sei. Technol. A 17 2510-16
5. Kitajima T, Takeo Y and Petrovic Z Lj and Makabe T 2000 Appl. Phys. Lett. 77 489-91
6. Goto H H, Löwe H-D and Ohmi T 1992 J. Vac. Sei. Technol. A 10 3048-54
7. Georgieva V, Bogaerts A and Gijbels R 2003 J. Appl. Phys. 94 3748-56
8. Lieberman M, Misium G R and Lichtenberg A J 1989 J. Vac. Sei. Technol. A 7 1007
9. Lieberman M 1988 IEEE. Trans. Plasma Sei. 16 638-44
10. Lieberman M 1989 IEEE. Trans. Plasma Sei. 17 339-341
11. Godyak V 1976 Sov. J. Plasma Phys. 12 78
12. Godyak V A and Sternberg N 1990 Phys. Rev. A 42 2299-312
13. Boyle P C, Ellingboe A R and Turner M M 2004 J. Phys. D: Appl. Phys. 37 697-701
14. Kim H C, Lee J K and Shon J W 2003 Phys. Plasmas 10 4545-51
15. Robiche J, Boyle P C, Turner M M and Ellingboe A 2003 J. Phys. D: Appl. Phys. 36 1810-16
16. Franklin R N 2003 J. Phys. D: Appl. Phys. 36 2660-61
17. Rayzer Y P 1987 Gas Discharge Physics (Berlin: Springer)
18. Gierling J and Riemann K-U 1998 J. Appl. Phys. 83 3521-8
19. Allen J E and Skorik M A 1993 J. Plasma Phys. 50 243-9
20. Kawamura E et al 1999 Plasma Sources Sei. Technol. 8 R45-R64
21. Smirnov B M 2001 Physics Ionised Cases (New York: Wiley)
22. Hombeck J A 1951 Phys. Rev. 84 615-20
23. Boeuf J-P and Pitchford L C 1995 Phys. Rev. E 51 1376-90
24. Wolfram S 1996 The Mathematica® Book (Cambridge: Cambridge University Press)