Spatiotemporal characteristics of the collisionless rf sheath and the ion energy distributions arriving at rf-biased electrodes

Physical Review E - Statistical Physics, Plasmas, Fluids, and Related Interdisciplinary Topics

Volumn 65, Issue 3, 2002, Pages

  Dai, Zhong Ling ^a   Wang, You Nian ^a   Ma, Teng Cai ^a  

^a DALIAN UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

BOUNDARY CONDITIONS; CARRIER CONCENTRATION; COMPUTER SIMULATION; ELECTRIC FIELDS; ELECTRODES; IONS; MATHEMATICAL MODELS; NUMERICAL METHODS; VELOCITY MEASUREMENT; VOLTAGE CONTROL;

ION ENERGY DISTRIBUTION (IED); RADIO FREQUENCY SHEATHS; RADIO FREQUENCY-BASED ELECTRODES; SPATIOTEMPORAL CHARACTERISTICS;

PLASMA SHEATHS;

EID: 41349106343     PISSN: 1063651X     EISSN: None     Source Type: Journal    
DOI: 10.1103/PhysRevE.65.036403     Document Type: Article

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