메뉴 건너뛰기




Volumn 77, Issue 1, 2008, Pages

Elemental redistribution and Ge loss during ion-beam synthesis of Ge nanocrystals in SiO2 films

Author keywords

[No Author keywords available]

Indexed keywords


EID: 38549108397     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.77.014107     Document Type: Article
Times cited : (39)

References (70)
  • 1
    • 38549171397 scopus 로고    scopus 로고
    • 2003 edition of the ITRS
    • 2003 edition of the ITRS, http://public.itrs.net/
  • 3
    • 33750920060 scopus 로고    scopus 로고
    • edited by E. Zschech, C. Whelan, and T. Mikolajick (Springer, Berlin
    • V. Beyer and J. von Borany, in Materials for Information Technologies, edited by, E. Zschech,,, C. Whelan,, and, T. Mikolajick, (Springer, Berlin, 2005), pp. 139-147.
    • (2005) Materials for Information Technologies , pp. 139-147
    • Beyer, V.1    Von Borany, J.2
  • 5
    • 2942648428 scopus 로고    scopus 로고
    • SSELA5 0038-1101 10.1016/j.sse.2004.03.016
    • P. Dimitrakis, Solid-State Electron. SSELA5 0038-1101 10.1016/j.sse.2004.03.016 48, 1511 (2004).
    • (2004) Solid-State Electron. , vol.48 , pp. 1511
    • Dimitrakis, P.1
  • 17
    • 0000534494 scopus 로고    scopus 로고
    • SIANDQ 0142-2421 10.1002/(SICI)1096-9918(200004)29:4<249::AID- SIA735>3.0.CO;2-5
    • S. Oswald, B. Schmidt, and K.-H. Heinig, Surf. Interface Anal. SIANDQ 0142-2421 10.1002/(SICI)1096-9918(200004)29:4<249::AID-SIA735>3.0.CO;2-5 29, 249 (2000).
    • (2000) Surf. Interface Anal. , vol.29 , pp. 249
    • Oswald, S.1    Schmidt, B.2    Heinig, K.-H.3
  • 21
    • 0032075194 scopus 로고    scopus 로고
    • SIANDQ 0142-2421 10.1002/(SICI)1096-9918(19980501)26:5<359::AID- SIA379>3.3.CO;2-P
    • A. Markwitz, W. Matz, B. Schmidt, and R. Grötzschel, Surf. Interface Anal. SIANDQ 0142-2421 10.1002/(SICI)1096-9918(19980501)26:5<359::AID- SIA379>3.3.CO;2-P 26, 359 (1998).
    • (1998) Surf. Interface Anal. , vol.26 , pp. 359
    • Markwitz, A.1    Matz, W.2    Schmidt, B.3    Grötzschel, R.4
  • 23
    • 0343167282 scopus 로고
    • SUSCAS 0039-6028 10.1016/0167-2584(87)90829-2
    • S. Tanuma, C. Powell, and D. Penn, Surf. Sci. SUSCAS 0039-6028 10.1016/0167-2584(87)90829-2 192, L849 (1987).
    • (1987) Surf. Sci. , vol.192 , pp. 849
    • Tanuma, S.1    Powell, C.2    Penn, D.3
  • 26
    • 38549161630 scopus 로고    scopus 로고
    • SRIM program is free for download at
    • SRIM program is free for download at http://www.srim.org
  • 27
    • 2342467454 scopus 로고    scopus 로고
    • JECMA5 0361-5235 10.1007/s11664-004-0144-4
    • J. Oh and J. C. Campbell, J. Electron. Mater. JECMA5 0361-5235 10.1007/s11664-004-0144-4 33, 364 (2004).
    • (2004) J. Electron. Mater. , vol.33 , pp. 364
    • Oh, J.1    Campbell, J.C.2
  • 32
    • 38549085760 scopus 로고
    • 8th ed. (Verlag Chemie, GmbH, Weinheim/Bergstrasse
    • R. Meyer and E. E. Pietsch, Gmelins Handbuch der Anorganischen Chemie, 8th ed. (Verlag Chemie, GmbH, Weinheim/Bergstrasse, 1958), Vol. 45, Chap., pp. 32-33,457,493,502-506.
    • (1958) Gmelins Handbuch der Anorganischen Chemie , vol.45 , pp. 32-33
    • Meyer, R.1    Pietsch, E.E.2
  • 33
    • 32644436700 scopus 로고
    • JESOAN 0013-4651 10.1149/1.2428685
    • W. W. Harvey and H. C. Gatos, J. Electrochem. Soc. JESOAN 0013-4651 10.1149/1.2428685 105, 654 (1958).
    • (1958) J. Electrochem. Soc. , vol.105 , pp. 654
    • Harvey, W.W.1    Gatos, H.C.2
  • 36
    • 0021517155 scopus 로고
    • JAPIAU 0021-8979 10.1063/1.333789
    • T. A. Michalske and B. C. Bunker, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.333789 56, 2686 (1984).
    • (1984) J. Appl. Phys. , vol.56 , pp. 2686
    • Michalske, T.A.1    Bunker, B.C.2
  • 37
    • 0003998388 scopus 로고    scopus 로고
    • edited by D. R. Lide, 82nd ed. (CRC Press, Boca Roton, FL
    • CRC Handbook of Chemistry and Physics, edited by, D. R. Lide,, 82nd ed. (CRC Press, Boca Roton, FL, 2001).
    • (2001) CRC Handbook of Chemistry and Physics
  • 38
    • 84982383110 scopus 로고
    • ZAACAB 0044-2313 10.1002/zaac.19512660602
    • W. Bues and H. v. Wartenberg, Z. Anorg. Allg. Chem. ZAACAB 0044-2313 10.1002/zaac.19512660602 266, 281 (1951).
    • (1951) Z. Anorg. Allg. Chem. , vol.266 , pp. 281
    • Bues, W.1    V. Wartenberg, H.2
  • 39
    • 33947455109 scopus 로고
    • JACSAT 0002-7863 10.1021/ja01142a056
    • W. L. Jolly and W. M. Latimer, J. Am. Chem. Soc. JACSAT 0002-7863 10.1021/ja01142a056 74, 5757 (1952).
    • (1952) J. Am. Chem. Soc. , vol.74 , pp. 5757
    • Jolly, W.L.1    Latimer, W.M.2
  • 41
    • 0000601171 scopus 로고
    • PRBMDO 0163-1829 10.1103/PhysRevB.27.5180
    • S. Ciraci and H. Wagner, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.27.5180 27, 5180 (1983).
    • (1983) Phys. Rev. B , vol.27 , pp. 5180
    • Ciraci, S.1    Wagner, H.2
  • 43
    • 0000107318 scopus 로고
    • PRBMDO 0163-1829 10.1103/PhysRevB.43.9281
    • C. U. S. Larsson and A. S. Flodström, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.43.9281 43, 9281 (1991).
    • (1991) Phys. Rev. B , vol.43 , pp. 9281
    • Larsson, C.U.S.1    Flodström, A.S.2
  • 44
  • 48
    • 23144447228 scopus 로고    scopus 로고
    • JNCSBJ 0022-3093 10.1016/j.jnoncrysol.2005.04.052
    • M. V. Minke and K. A. Jackson, J. Non-Cryst. Solids JNCSBJ 0022-3093 10.1016/j.jnoncrysol.2005.04.052 351, 2310 (2005).
    • (2005) J. Non-Cryst. Solids , vol.351 , pp. 2310
    • Minke, M.V.1    Jackson, K.A.2
  • 51
    • 0000989401 scopus 로고    scopus 로고
    • PRBMDO 0163-1829 10.1103/PhysRevB.62.2983
    • T. Uchino, M. Takahashi, and T. Yoko, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.62.2983 62, 2983 (2000).
    • (2000) Phys. Rev. B , vol.62 , pp. 2983
    • Uchino, T.1    Takahashi, M.2    Yoko, T.3
  • 54
    • 4243615182 scopus 로고    scopus 로고
    • PRBMDO 0163-1829 10.1103/PhysRevB.66.045307
    • A. Stesmans, B. Nouwen, and V. V. Afanas'ev, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.66.045307 66, 045307 (2002).
    • (2002) Phys. Rev. B , vol.66 , pp. 045307
    • Stesmans, A.1    Nouwen, B.2    Afanas'Ev, V.V.3
  • 62
    • 0037158056 scopus 로고    scopus 로고
    • JCPSA6 0021-9606 10.1063/1.1485730
    • N. Capron and G. Boureau, J. Chem. Phys. JCPSA6 0021-9606 10.1063/1.1485730 117, 1843 (2002).
    • (2002) J. Chem. Phys. , vol.117 , pp. 1843
    • Capron, N.1    Boureau, G.2
  • 63
    • 0034261329 scopus 로고    scopus 로고
    • PRBMDO 0163-1829 10.1103/PhysRevB.62.6158
    • P. E. Blöchl, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.62.6158 62, 6158 (2000).
    • (2000) Phys. Rev. B , vol.62 , pp. 6158
    • Blöchl, P.E.1
  • 65
    • 0001473887 scopus 로고
    • APPLAB 0003-6951 10.1063/1.110212
    • D. Tsoukalas and C. Tsamis, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.110212 63, 3167 (1993).
    • (1993) Appl. Phys. Lett. , vol.63 , pp. 3167
    • Tsoukalas, D.1    Tsamis, C.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.