Factors affecting extended hydration depths in ion-implanted fused silica

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 116, Issue 1-4, 1996, Pages 364-368

  Arnold, G W ^a   De Marchi, G ^a   Mazzoldi, P ^a   Battaglin, G ^b  

^a UNIVERSITY OF PADOVA   (Italy)

^b CA' FOSCARI UNIVERSITY OF VENICE   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; FRACTURE; FUSED SILICA; HYDROGEN; ION IMPLANTATION; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SOL-GELS; STRUCTURE (COMPOSITION);

ALKALI DEPLETION; ELASTIC RECOIL DETECTION; GASEOUS IMPLANT DISTRIBUTION; HIGH COLLISIONAL ENERGY DEPOSITION; NUCLEAR REACTION ANALYSIS;

HYDRATION;

EID: 0030218184     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0168-583X(96)00071-7     Document Type: Article

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