Depth profile analysis: STEM-EDX vs. RBS

Surface and Interface Analysis

Volumn 26, Issue 5, 1998, Pages 359-366

  Markwitz, A ^a,b   Matz, W ^a   Schmidt, B ^a   Grotzschel R ^a  

^a INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

^b GNS SCIENCE   (New Zealand)

Author keywords

Depth profiling; Nanocluster; Self diffusion in metals; X ray technique for structure analysis

Indexed keywords

DIFFUSION; RUTHERFORD BACKSCATTERING SPECTROSCOPY; TRANSMISSION ELECTRON MICROSCOPY; X RAY ANALYSIS;

DEPTH PROFILE ANALYSIS;

SCANNING ELECTRON MICROSCOPY;

EID: 0032075194     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1096-9918(19980501)26:5<359::AID-SIA379>3.0.CO;2-Y     Document Type: Article

References (9)

1. W. K. Chu, J. W. Mayer and M. A. Nicolet, Backscattering Spectrometry. Academic Press, London (1978).
2. A. Markwitz and G. Demortier, Surf. Interface Anal. 24, 868 (1996).
3. A. Markwitz and G. Demortier, International Symposium on Materials Science Applications of Ion Beam Techniques, Trans. Tech. Publ. 248/249, 163 (1997).
4. A. Markwitz and G. Demortier, Diffusion in Materials, edited by H. Mehrer, Chr. Herzig, N. A. Stolwijk and H. Bracht, Defect and Diffusion Forum, Vols. 143-147, Part 2, p. 1303. Scitec Publications, Switzerland (1997).
5. L. Doolitlle, Nucl. Instrum. Methods B9, 334 (1985).
6. A. Markwitz, B. Schmidt, R. Grötzschel, A. Mücklich and W. Matz, Nucl. Instrum. Methods B.
7. The powder diffraction file, set 1-46. International Centre for Diffraction Data, Newton Square, PA 19073-3273.
8. H. Seifarth, R. Grötzschel, A. Markwitz, W. Matz, P. Nitzsche and L Rebole, Thin Solid Films (1998).
9. K. H. Heinig, B. Schmidt, R. Grötzschel, A. Markwitz, J. von Borany and M. Strobel, Phys. Rev. B..