Thermal Desorption of Ge Native Oxides and the Loss of Ge fom the Surface

Journal of Electronic Materials

Volumn 33, Issue 4, 2004, Pages 364-367

  Oh, Jungwoo ^a   Campbell, Joe C ^a  

^a UNIVERSITY OF TEXAS AT AUSTIN   (United States)

Author keywords

Ge native oxides; Thermal desorption; X ray photoemission spectroscopy (XPS)

Indexed keywords

ANNEALING; ATMOSPHERIC PRESSURE; DESORPTION; LIGHT ABSORPTION; PHOTODETECTORS; PHOTONS; SILICA; SURFACE TREATMENT; X RAY PHOTOELECTRON SPECTROSCOPY;

GE NATIVE OXIDES; PHOTONIC DEVICES; THERMAL DESORPTION;

GERMANIUM COMPOUNDS;

EID: 2342467454     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-004-0144-4     Document Type: Article

References (19)

1. C. Chui, S. Ramanathan, B.B. Triplett, P.C. McIntyre, and K.C. Saraswat, IEEE Electron Dev. Lett. 23, 473 (2002).
2. T. Low, Y.T. Hou, M.F. Li, Z. Chunxiang, D.-L. Kwong, and A. Chin, Symp. VLSI Tech. Dig., p. 117 (2003).
3. S. Luryi, A. Kastalsky, and J.C. Bean, IEEE Trans. Electron Dev. ED-31, 1135 (1984).
4. L. Colace, G. Masini, G. Assanto, H.C. Luan, K. Wada, and L.C. Kimerling, Appl. Phys. Lett. 76, 1231 (2000).
5. J.L. Liu, S. Tong, Y.H. Luo, J. Wan, and K.L. Wang, Appl. Phys. Lett. 79, 3431 (2001).
6. J. Oh, J.C. Campbell, S.G. Thomas, S. Bharatan, R. Thoma, C. Jasper, R.E. Jones, and T.E. Zirkle, IEEE J. Quantum Electron 38, 1238 (2002).
7. N. Miyata, M. Shigeno, Y. Arimoto, and T. Ito, J. Appl. Phys. 74, 5275 (1993).
8. P.J. Grunthaner, M.H. Hecht, F.J. Grunthaner, and N.M. Johnson, J. Appl. Phys., 61, 629 (1987).
9. P. Morgen, U. Höfer, W. Wurth, and E. Umbach, Phys. Rev. B 39, 3720 (1989).
10. M. Liehr, J.E. Lewis, and G.W. Rubloff, J. Vac. Sci. Technol A 5, 1559 (1987).
11. Y. Kobayashi, Y. Shinoda, and K. Sugii, Jpn. J. Appl. Phys. 29, 1004 (1990).
12. L. Surnev and M. Tikhov, Surf. Sci. 123, 505 (1982).
13. X.-J. Zhang, G. Xue, A. Agarwal, R. Tsu, M.-A. Hasan, J.E. Greene, and A. Rockett, J. Vac. Sci. Technol. 11, 2553 (1993).
14. K. Prabhakaran and T. Ogino, Surf. Sci. 325, 263 (1995).
15. K. Prabhakaran, F. Maeda, Y. Watanabe, and T. Ogino, Appl. Phys. Lett. 76, 2244 (2000).
16. D. Schmeisser, R.D. Schnell, A. Bogen, F.J. Himpsel, D. Rieger, G. Landgren, and J.F. Morar, Surf. Sci. 172, 455 (1986).
17. M.P. Seah and WA. Dench, Surf. Interf. Anal. 1, 2 (1979).
18. CRC Handbook of Chemistry and Physics (Boca Raton, FL: CRC Press, 1993), pp. 4-61.
19. D.A. Hansen and J.B. Hudson, Surf. Sci. 292, 17 (1993).