Impact of ambient atmosphere on as-implanted amorphous insulating layers

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 191, Issue 1-4, 2002, Pages 482-486

  Schmidt, Bernd ^a   Grambole, D ^a   Herrmann, F ^a  

^a INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

Author keywords

Ion implantation; SiO2; Water absorption

Indexed keywords

AMORPHOUS MATERIALS; ANNEALING; DIFFUSION; HEAVY IONS; HYDROGEN; IMPURITIES; MOISTURE; SILICA; WATER ABSORPTION;

AMBIENT ATMOSPHERE;

ION IMPLANTATION;

EID: 0036574692     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(02)00597-9     Document Type: Conference Paper

References (14)