Precipitation, ripening and chemical effects during annealing of Ge+ implanted SiO2 layers

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 148, Issue 1-4, 1999, Pages 969-974

  Heinig, K H ^a   Schmidt, B ^a   Markwitz, A ^a   Grotzschel R ^a   Strobel, M ^a   Oswald, S ^b  

^a INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

^b IFW DRESDEN   (Germany)

Author keywords

Annealing; Germanium; Ion beam synthesis; Modeling; Oxidation; Silicon dioxide

Indexed keywords

ANNEALING; ION BEAMS; ION IMPLANTATION; MONTE CARLO METHODS; NANOSTRUCTURED MATERIALS; OXIDATION; PRECIPITATION (CHEMICAL); RUTHERFORD BACKSCATTERING SPECTROSCOPY; SEMICONDUCTING GERMANIUM; SILICA; TRANSMISSION ELECTRON MICROSCOPY; X RAY CRYSTALLOGRAPHY;

ION-BEAM SYNTHESIS;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 0033513861     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(98)00862-3     Document Type: Article

References (16)

1. L. Rebohle, J. von Borany, R.A. Yankov, W. Skorupa, I.E. Tyschenko, H. Fröb, K. Leo, Appl. Phys. Lett. 71 (1997) 2809.
2. M.L. Brongersma, A. Polman, K.S. Min, E. Boer, T. Tambo, H.A. Atwater, Appl. Phys. Lett. 72 (1998) 2577.
3. M.Y. Hao, H. Hwang, J.C. Lee, Appl. Phys. Lett. 62 (1993) 1530.
4. H.I. Hanafi, J. Klein, IEEE Trans. Electron Devices 43 (1996) 1553.
5. J. von Borany, R. Grötzschel, K.H. Heinig, A. Markwitz, B. Schmidt, W. Skorupa, Solid State Electronics, in press.
6. J. von Borany, R. Grötzschel, K.H. Heinig, A. Markwitz, W. Matz, B. Schmidt, W. Skorupa, Appl. Phys. Lett. 71 (1997) 3215.
7. J.F. Ziegler (Ed.), SRIM: The Stopping and Range of Ions in Matter, Program Manual, 1996.
8. A. Markwitz, B. Schmidt, W. Matz, R. Grötzschel, A. Mücklich, Nucl. Instr. and Meth. B 142 (1998) 338.
9. V.A. Borodin, K.H. Heinig, B. Schmidt, Nucl. Instr. and Meth. B 147 (1998) 286.
10. V.A. Borodin, K.H. Heinig, to be published.
11. 2 Interface, Plenum Press, New York, 1993, pp. 67-72.
12. I.M. Lifshitz, V.V. Slyzov, J. Phys. Chem. Solids 19 (1961) 35.
13. C. Wagner, Z. Elektrochem. 65 (1961) 581.
14. A.D. Brailsford, J. Nucl. Mater. 60 (1976) 257.
15. V.A. Borodin, K.H. Heinig, S. Reiss, Phys. Rev. B 56 (1997) 5332.
16. D.R. Lide (Ed.) CRC Handbook of Chemistry and Physics, CRC Press, London, 1993.