Ion irradiation through SiO2/Si interfaces: Non-conventional fabrication of Si nanocrystals for memory applications

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 242, Issue 1-2, 2006, Pages 146-148

  Schmidt, B ^a   Heinig, K H ^a   Rontzsch L ^a   Muller T ^a   Stegemann, K H ^b   Votintseva, E ^b  

^a INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

^b ZMD AG   (Germany)

Author keywords

Ion irradiation; Nanocluster; Non volatile multi dot floating gate memory; Phase separation

Indexed keywords

ION BOMBARDMENT; IRRADIATION; MOS DEVICES; RAPID THERMAL ANNEALING; SILICON COMPOUNDS; SINGLE CRYSTALS;

ION IRRADIATION; NANOCLUSTER; NON-VOLATILE MULTIDOT-FLOATING GATE MEMORIES;

NANOSTRUCTURED MATERIALS;

EID: 28544435640     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2005.08.011     Document Type: Conference Paper

References (9)

1. S. Tiwari, F. Rana, H. Hanafi, A. Hartstein, E.F. Crabbe, and K. Chan Appl. Phys. Lett. 68 1996 1377
2. P. Normand, E. Kapetanakis, P. Dimitrakis, D. Tsoukalas, K. Beltsios, N. Cherkashin, C. Bonafos, G. Benassayag, H. Coffin, A. Claverie, V. Soncini, A. Agarwal, and M. Ameen Appl. Phys. Lett. 83 2003 168
3. P. Normand, E. Kapetanakis, P. Dimitrakis, D. Skarlatos, K. Beltsios, D. Tsoukalas, C. Bonafos, G. Ben Assayag, N. Cherkashin, A. Claverie, J.A. Van Den Berg, V. Soncini, A. Agarwal, M. Ameen, M. Perego, and M. Franciulli Nucl. Instr. and Meth. B 216 2004 228
4. K.-H. Heinig, T. Müller, B. Schmidt, M. Strobel, and W. Möller Appl. Phys. A 77 2003 17
5. L. Röntzsch, K.-H. Heinig, B. Schmidt, A. Mücklich, Nucl. Instr. and Meth. B, these Proceedings, doi:10.1016/j.nimb.2005.08.012.
6. B. Schmidt, D. Grambole, and F. Herrmann Nucl. Instr. and Meth. B 191 2002 482
7. Available from: < http://www.zmd.de >.
8. M. Perego, private communication.
9. J.D. Casperson, L.D. Bell, and H.A. Atwater J. Appl. Phys. 92 2002 261